00198371-01_UM_SWS-EN - 第53页
User manual SIPLACE Wafer System (SWS) 2 Operational safety Edition 04/2018 2.6 Safety features 53 2.6.3 Safety cutoff The SIPLACE W afer System (SW S) safety cutoff is locked with the SIPLACE CA4 V2 so that the SIPLACE …
2 Operational safety User manual SIPLACE Wafer System (SWS)
2.6 Safety features Edition 04/2018
52
EMERGENCY STOP button with forced locking
The EMERGENCY STOP button is red and latches in the ON position when pressed. Pressing
the EMERGENCY STOP button triggers the safety cutoff (see also section 2.6.3
, page 53).
The operating status indicator (white) is switched off.
Main power switch in the OFF position
2
Main switch in ON position
After you switch on using the main switch, the SIPLACE Wafer System computer will boot.
Position switch, SWS sliding door
The position switch checks whether the SWS sliding door is open or closed. The position switch
on the SWS sliding door triggers the safety cutoff (lock) when the SWS sliding door is opened.
Individual components are disabled or remain enabled
DANGER
Lethal voltages!
Incorrect handling of the SIPLACE Wafer System can therefore result in death or severe
injury or considerable damage to equipment.
Some parts of the SIPLACE Wafer System carry potentially lethal voltages, even when it
is switched off at the main power switch:
Always follow the applicable accident prevention and DIN regulations (particularly EN
60204, part 1 or IEC 60204, part 1) and the applicable regulations in your own coun-
try.
The safety door to the power supply must ONLY be opened by appropriately qualified
and trained personnel.
User manual SIPLACE Wafer System (SWS) 2 Operational safety
Edition 04/2018 2.6 Safety features
53
2.6.3 Safety cutoff
The SIPLACE Wafer System (SWS) safety cutoff is locked with the SIPLACE CA4 V2 so that the
SIPLACE Wafer System is only active if the safety cutoff (CSB) for the SIPLACE CA4 V2 is en-
abled.
When pressed, the EMERGENCY STOP button on the SIPLACE Wafer System affects the safety
cutoff (CSB) for the SIPLACE CA4 V2 by triggering the emergency stop function of the SIPLACE
CA4 V2 and also the emergency stop function of the SIPLACE Wafer System via its own safety
cutoff.
2.6.3.1 Prerequisites
The following conditions must be fulfilled in order to start and operate the SWS with the SIPLACE
CA4 V2:
– All component trolleys must be docked into place.
– The SIPLACE Wafer System modules must be fitted and connected (interface connector
X1*3).
– The sliding door of the installed SIPLACE Wafer System modules must be closed.
– All protective covers on the SIPLACE CA4 V2 must be closed.
– All side sliding doors on the SIPLACE CA4 V2 must be closed.
– The two EMERGENCY STOP buttons on the SIPLACE CA4 V2 and the SIPLACE Wafer Sys-
tem (one EMERGENCY STOP button per SWS) must be released.
– The minimum operating pressure must have been reached.
– The software release ("Control ON") must be enabled.
If one of the start buttons is now pressed, the safety cutoff (CBS) will switch the supply voltage on.
The SWS and the SIPLACE CA4 V2 will be ready for operation.
2.6.3.2 Safety cutoff components
The following components are monitored by the safety cutoff:
– Position switch of the four protective covers on the SIPLACE CA4 V2
– Position switch of the four side sliding doors on the SIPLACE CA4 V2
– Position switch for the sliding door on the SIPLACE Wafer System (SWS)
– Two EMERGENCY STOP buttons on the SIPLACE CA4 V2
– EMERGENCY STOP button on the SIPLACE Wafer System (SWS)
– Position switch on the COT inserts of the SIPLACE CA4 V2
2 Operational safety User manual SIPLACE Wafer System (SWS)
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2.6.3.3 Enabling the EMERGENCY STOP
If problems occur, the SIPLACE Wafer System (SWS) can be stopped by pressing the EMER-
GENCY STOP button.
An EMERGENCY STOP can be triggered by:
– Pressing the EMERGENCY STOP button on the SIPLACE Wafer System (SWS)
– Pressing an EMERGENCY STOP button on the SIPLACE CA4 V2
In these cases, the safety cutoffs of the SIPLACE CA4 V2 and SIPLACE Wafer System are trig-
gered and the power contactor is switched off within 100 ms or 500 ms (STOP category 1, con-
trolled shutdown with interruption of energy supply at standstill).
2.6.3.4 Resetting an EMERGENCY STOP
To reset an EMERGENCY STOP, make sure that the EMERGENCY STOP buttons for the SI-
PLACE CA4 V2 and the SIPLACE Wafer System (SWS) are unlocked.
Find out the reason why the EMERGENCY STOP button triggered.
Remove the cause.
Unlock the relevant EMERGENCY STOP button for the SIPLACE CA4 V2 or the
SIPLACE Wafer System (SWS).
2.6.3.5 Resetting the lock
Close any open protective covers/sliding doors on the SIPLACE CA4 V2.
Close the open sliding door on the SIPLACE Wafer System (SWS).
2.6.3.6 Triggering the lock
Open a protective cover/sliding door on the SIPLACE CA4 V2.
Open the sliding door on the SIPLACE Wafer System (SWS).