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2 Operational safety User manual SIPLACE Wafer System (SWS) 2.6 Safety features Edition 04/2018 54 2.6.3.3 Enabling the EMERGENCY STOP If problems occur , the SIPLACE W afer System (S WS) can be stopped by pressing the E…

User manual SIPLACE Wafer System (SWS) 2 Operational safety

Edition 04/2018 2.6 Safety features

2.6.3 Safety cutoff

The SIPLACE Wafer System (SWS) safety cutoff is locked with the SIPLACE CA4 V2 so that the

SIPLACE Wafer System is only active if the safety cutoff (CSB) for the SIPLACE CA4 V2 is en-

abled.

When pressed, the EMERGENCY STOP button on the SIPLACE Wafer System affects the safety

cutoff (CSB) for the SIPLACE CA4 V2 by triggering the emergency stop function of the SIPLACE

CA4 V2 and also the emergency stop function of the SIPLACE Wafer System via its own safety

cutoff.

2.6.3.1 Prerequisites

The following conditions must be fulfilled in order to start and operate the SWS with the SIPLACE

CA4 V2:

– All component trolleys must be docked into place.

– The SIPLACE Wafer System modules must be fitted and connected (interface connector

X1*3).

– The sliding door of the installed SIPLACE Wafer System modules must be closed.

– All protective covers on the SIPLACE CA4 V2 must be closed.

– All side sliding doors on the SIPLACE CA4 V2 must be closed.

– The two EMERGENCY STOP buttons on the SIPLACE CA4 V2 and the SIPLACE Wafer Sys-

tem (one EMERGENCY STOP button per SWS) must be released.

– The minimum operating pressure must have been reached.

– The software release ("Control ON") must be enabled.

If one of the start buttons is now pressed, the safety cutoff (CBS) will switch the supply voltage on.

The SWS and the SIPLACE CA4 V2 will be ready for operation.

2.6.3.2 Safety cutoff components

The following components are monitored by the safety cutoff:

– Position switch of the four protective covers on the SIPLACE CA4 V2

– Position switch of the four side sliding doors on the SIPLACE CA4 V2

– Position switch for the sliding door on the SIPLACE Wafer System (SWS)

– Two EMERGENCY STOP buttons on the SIPLACE CA4 V2

– EMERGENCY STOP button on the SIPLACE Wafer System (SWS)

– Position switch on the COT inserts of the SIPLACE CA4 V2

2 Operational safety User manual SIPLACE Wafer System (SWS)

2.6 Safety features Edition 04/2018

2.6.3.3 Enabling the EMERGENCY STOP

If problems occur, the SIPLACE Wafer System (SWS) can be stopped by pressing the EMER-

GENCY STOP button.

An EMERGENCY STOP can be triggered by:

– Pressing the EMERGENCY STOP button on the SIPLACE Wafer System (SWS)

– Pressing an EMERGENCY STOP button on the SIPLACE CA4 V2

In these cases, the safety cutoffs of the SIPLACE CA4 V2 and SIPLACE Wafer System are trig-

gered and the power contactor is switched off within 100 ms or 500 ms (STOP category 1, con-

trolled shutdown with interruption of energy supply at standstill).

2.6.3.4 Resetting an EMERGENCY STOP

To reset an EMERGENCY STOP, make sure that the EMERGENCY STOP buttons for the SI-

PLACE CA4 V2 and the SIPLACE Wafer System (SWS) are unlocked.

 Find out the reason why the EMERGENCY STOP button triggered.

 Remove the cause.

 Unlock the relevant EMERGENCY STOP button for the SIPLACE CA4 V2 or the

SIPLACE Wafer System (SWS).

2.6.3.5 Resetting the lock

 Close any open protective covers/sliding doors on the SIPLACE CA4 V2.

 Close the open sliding door on the SIPLACE Wafer System (SWS).

2.6.3.6 Triggering the lock

 Open a protective cover/sliding door on the SIPLACE CA4 V2.

 Open the sliding door on the SIPLACE Wafer System (SWS).

User manual SIPLACE Wafer System (SWS) 2 Operational safety

Edition 04/2018 2.6 Safety features

2.6.4 Energy state of the SWS after switching off at the main power switch

2.6.5 Compressed air conditions in the SWS after switching off at the main power

switch

When switching off the main switch or if the power supply fails, the electrically-controlled main

valve of the compressed air unit will close. The pressure will drop to 0 MPa (0 bar) within 5 sec-

onds.

CAUTION

 Please note that each SIPLACE Wafer System has its own main switch.

DANGER

Lethal voltages in the power supply unit!

The power supply unit has certain components (such as the mains power filter) which still

conduct lethal voltages even when it is switched off.

 Only ASM Assembly Systems GmbH&Co.KG service engineers or the machine

owner's service engineers, who have been trained by ASM, may perform work on the

power supply and the safety cutoff (CBS).

CAUTION

Data loss!

To avoid data loss, only switch the SIPLACE Wafer System off after fulfilling the following

criteria (unless it is an emergency):

– The SIPLACE Wafer System has completed data transfer.

– The SIPLACE Wafer System has completed processing.

– The SIPLACE Wafer System has completed the shutdown phase.