00198371-01_UM_SWS-EN - 第79页
User manual SIPLACE Wafer System (SWS) 3 Technical data and assemblies Edition 04/2018 3.4 Description of the SWS modules 79 3.4.7.1 Magazine lif t 3 Fig. 3.4 - 9 Magazine lift (1) Magazine rack with adjustab le magazine…
3 Technical data and assemblies User manual SIPLACE Wafer System (SWS)
3.4 Description of the SWS modules Edition 04/2018
78
3
Fig. 3.4 - 8 Wafer changer system
(1) Wafer changer with gripper
(2) Magazine lift
1
2
User manual SIPLACE Wafer System (SWS) 3 Technical data and assemblies
Edition 04/2018 3.4 Description of the SWS modules
79
3.4.7.1 Magazine lift
3
Fig. 3.4 - 9 Magazine lift
(1) Magazine rack with adjustable magazine plate
(2) Motor
(3) Wafer changer with cover
2
3
1
3 Technical data and assemblies User manual SIPLACE Wafer System (SWS)
3.4 Description of the SWS modules Edition 04/2018
80
3.4.7.2 Adjustable magazine plate
3
Fig. 3.4 - 10 Adjustable magazine plate
3
The stop bars can be fitted in the relevant positions for 6", 8"or 12" magazines.
(1) Stop bar for fixed assembly position (for 6",
8"or 12 " magazines
(2) Stop bar for variable assembly position (for
6", 8"or 12 " magazines
(3) Magazine recognition
2
1
3