00198371-01_UM_SWS-EN - 第89页
User manual SIPLACE Wafer System (SWS) 4 Setting up and commissioning Edition 04/2018 4.2 Infrastructure a t the installation location 89 4.2.4 Removing the transport locks – Remove all adhesive tape and ca ble ties whic…
4 Setting up and commissioning User manual SIPLACE Wafer System (SWS)
4.2 Infrastructure at the installation location Edition 04/2018
88
4
4.2.3.2 Checking the mains power supply
Check whether the power supply complies with the prescribed machine specifications (see table
in section 3.2.3
, page 62).
4
DANGER
Lethal voltages under the safety cutoff (CSB) cover!
Under the cover there are components which could still carry lethal voltages, even when
the machine is switched off and the mains plug has been disconnected. After disconnect-
ing the mains plug, wait 5 minutes until the capacitors have discharged.
Never open the covers.
Only ASM Assembly Systems GmbH&Co.KG service engineers or the machine
owner's service engineers, who have been trained by ASM, may perform work on the
power supply and the safety cutoff (CBS).
PLEASE NOTE
Load peaks in power supply
For technical reasons, load peaks occur in the power supply.
Please contact your power company to clarify the mains impedance, if necessary.
User manual SIPLACE Wafer System (SWS) 4 Setting up and commissioning
Edition 04/2018 4.2 Infrastructure at the installation location
89
4.2.4 Removing the transport locks
– Remove all adhesive tape and cable ties which were attached as transportation locks to the
various components:
– Reject bin is fixed with gray adhesive tape
– Wafer table for X axis is fixed with cable ties
– Wafer table for Y axis is fixed with cable ties
– Gripper is fixed with cable ties
– Flip unit is fixed with cable ties
– Wafer changer feed axis (if present)
4.2.5 Removing the corrosion protection from the guide rails
Check whether the SWS has been treated with corrosion protection agent. This must be removed
before setting up the SWS.
4
4
4.2.6 Power supply
After performing final adjustment, connect the SWS to the power supply.
CAUTION
Reduced product life of bearings and guide rails!
If the corrosion protection agent is mixed with the bearing grease on the axes this can
greatly reduce the service life of the bearings and guide rails.
You should therefore remove the corrosion protection from all the axes and bearings
when you traverse the machine axes for the first time during commissioning.
Grease all the axes and bearings with the grease described in the maintenance in-
structions.
CAUTION
Risk of damaging bearing grease!
Alcohol will damage the bearing grease in the guide carriages.
When cleaning the guide rails and scales, make sure that alcohol does not get into
the guide trolley.
4 Setting up and commissioning User manual SIPLACE Wafer System (SWS)
4.2 Infrastructure at the installation location Edition 04/2018
90