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4 Gantry System 4.2 Reference Run Technical Training FSE SIPLACE TX-Series 01/2018 37 Reference Run Workflow Reference Run detailed Workflow Preconditions: Axis reference run must be successfully completed for the releva…

4 Gantry System

4.2 Reference Run

36 Technical Training FSE SIPLACE TX-Series 01/2018

Mechanical Structure of X Axis

1. Board (head interface with Vision board,

below vertical – head adapter board)

2. Gantry arm made of carbon fiber

3. Sensor module for Y Axis*

4. YAxis linear motor (primary)

5. Trailing cable

6. XAxis end position bumper

7. Secondary parts XAxis (magnet)

8. Incremental scale / glass scale*

9. Head mounting plate with integrated

primary part of XAxis linear motor

10. Temperature sensor

11. Sensor module for X Axis (under the head

board)

*Only for TX micron

To improve placement accuracy, the temperature sensors are used to compensate machine cali-

bration data.

Mechanical Structure of Y Axis

1. Y linear motors (primary part) on the

XAxis gantry

2. Permanent magnet (secondary part of the

YAxis linear motor)

3. Linear guidance system

4. Incremental scale / glass scale*

* Only for TXmicron

4.2 Reference Run

After pressing start after machine boot up the axes move to a defined position. This is known as

the reference run.

4 Gantry System

4.2 Reference Run

Technical Training FSE SIPLACE TX-Series 01/2018 37

Reference Run Workflow

Reference Run detailed Workflow

Preconditions: Axis reference run must be successfully completed for the relevant placement

heads.

Commutation position search for 3 phases AC-drives on gantry during initial reference run:

1. Two motor phases are switched by the MGCU.

2. The 3-phase AC motor moves to the next suitable magnetic position.

3. Two other motor phases are switched by the power supply and the axis moves further.

4. These switching steps are repeated multiple times.

5. The axis reference run is continued with a reference position search for the position measur-

ing system.

4 Gantry System

4.2 Reference Run

38 Technical Training FSE SIPLACE TX-Series 01/2018

Reaching the HW end position, change of driving direction and finding the zero

pulse

After the commutation search, the motor is in an undefined position for the control system.

1. Referencing with bumper recognition (hardware end stops), the axis moves successively

against the bumpers. This is done using fixed target values set by the axis controller, these

are increasingly closer to the mechanical end stop.

2. After a some time, the axis reaches a state in which the set target position is no longer

reached (actual position ≠ target position), the axis is at the hardware end stop (bumper).

3. After reaching a certain motor current (approx.10ms later) the direction of travel is reversed

and the axis searches for the zero pulse within a specified range. The motor is now in posi-

tion control.

Zero pulse

Bumper

No searching area for the zero pulse configurable

Area to check the right zero pulse

Searching area for zero pulse configurable

4. The search for a zero pulse is prohibited within a certain distance from the bumper (approx.

25mm).

5. After moving out of this prohibited area, the search begins. If the zero pulse is found in this

area, further pulses will be searched for in an area of approx. 2.5 mm. If only one zero pulse

is found, an end position message is issued and the reference run is completed.

6. In the event of a fault (multiple zero pulses or no zero pulses in the defined area) the axis will

stop and an error message will be issued.

7. The axes are now in a defined position. After finding and checking the zero pulse, the zero

point correction is loaded.

8. The reference run for the main axes has now been completed.

9. The vacuum and height reference runs will begin.

The reference run for the main axes is started simultaneously at all gantries.

TX micron gantry differences

●

X/Y glass scale thermal stable Robax-scales (glass-ceramic composite) for gantry system

with highest resolution of 10nm.

●

Encoder interpolate 20um

– X-Encoder TXm MS30

– Y-Encoder TXm MS30

●

Two sensor modules mounted on the X-Axis which convert the analog X and Y track signals

in to digital signals.