5OM-1626-001_w - 第181页
5OM-1610 4-66 091 1-001A(M916WMM--0012) U28 POWER SUPPL Y PCB -A141 P24I CN4C 5 3 4 1 2 -X1414C 7 6 L-Axis 3 Limit (+) -B01 -B02 L-Axis 3 Limit (-) L.ON (+) (-) (-) (+) L.ON 24B 10B B02C B01C B05C CN7 B04C CN3 -X2803 X01…

5OM-1610
4-650911-001-(M916WMM--0011)
Multi Functions Head M Circuit Diagram
-X145P1
A145
-X1451A
2
1
P24G
P24M
P48G
P48G
P48G
P48M
P48M
P48M
CNP1
CN1A
-X145P2DCNP2D
CNP2C
CNP2B
CNP2A
Servo Motor AMP
CN2A
CN2B
CN2C
CN2D
-X1451B
2
1
CN1B
3
M
SSG
SHD
-M142
Nozzle 1 L Axis
-X141P1
A141
-X1411A
2
1
P24G
P24M
P48G
P48G
P48G
P48M
P48M
P48M
DC24V
Control Circuit Power Supply
4B
CNP1
1A
1B
2A
GND
48V
5A
6A
5B
6B
CN1A
-U28(X2)
[MM/12/7A]
-X141P2C
-X141P2A
CNP2D
4A
CNP2C
CNP2B
CNP2A
1B
4B
1A
2A
1B
2B
1A
2A
MRR
P5G
MR
P5
Servo Motor AMP
2B
5A
MDR
SHD
MD
CN2A
CN2B
CN2C
CN2D
-X1411B
2
1
CN1B
-X128X2:2
-X128X2:1
3
M
SSG
SHD
Nozzle 2 L Axis
-M142
3
M
SSG
SHD
Nozzle 3 L Axis
-M142
SHD
SHD
Nozzle 2 Z Axis
(Upper) (Lower)
-X145P2C
-X1452C
-X1452D
-X1412A
-X1412B
-X1412C
-X1412D
-X141P2D
-X141P2B
DC24V
Control Circuit Power Supply
-U28(X2)
[MM/11/4C]
-X128X2:2
-X128X2:1
U
V
W
E
1B
2B
1A
2A
3A
3B
U
V
W
E
B1
B2
1B
2B
1A
2A
3A
3B
U
V
W
E
B1
B2
1B
2B
1A
2A
U
V
W
E
4A
1B
4B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
4A
1B
4B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
4A
1B
4B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
4B
1A
1B
2A
5A
6A
5B
6B
4A
1B
4B
1A
2A
1B
2B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
U
V
W
E
4A
1B
4B
1A
2A
1B
2B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
U
V
W
E
1B
2B
1A
2A
3A
3B
U
V
W
E
B1
B2
1B
2B
1A
2A
3A
3B
U
V
W
E
B1
B2
4A
1B
4B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
4A
1B
4B
1A
2A
MRR
P5G
MR
P5
2B
5A
MDR
SHD
MD
1
2
3
4
-X141P3
CNP3
B2_C
B1_C
B2_D
B1_D
-U28(X8)
[MM/12/2E]
-X2808:5
-X2808:6
-X2808:3
-X2808:4
1
2
3
4
-X145P3
CNP3
-U28(X8)
[MM/12/2E]
-X2808:1
-X2808:2
48V
GND
DC48V
Main Circuit Power Supply
[MM/11/8B]
24V
GND
24V
GND
SSCNET
A145(CN1B)
[MM/12/7A]
Lower Stage Multiple Axis
SSCNET
A141(CN1A)
[MM/11/3C]
Upper Stage Multiple Axis
3
M
Nozzle 3 Z Axis
-M141
Red
Black
Green
White
:2
:4
:3
:1
White
Green
Black
Red
Blue
Blue
Yellow
White
Red
SSG
Red
Black
Yellow
Blue
:6
:5
:2
:4
:1
3
M
-M141
Red
Black
Green
White
:2
:4
:3
:1
White
Green
Black
Red
Blue
Blue
Yellow
White
Red
SSG
Red
Black
Yellow
Blue
:6
:5
:2
:4
:1
3
M
:2
:4
:3
:1
Nozzle 1 Z Axis
-M141
SSG
:6
:5
:2
:4
:1
B2_C
B1_C
B2_D
B1_D
SSCNET
[MM/01/4C]:(1)
[MM/01/8C]:(2)
SSCNET
[MM/01/4C]:(1)
[MM/01/8C]:(2)
-M141
-M141
-M141
-M141
-M141
-M141
48V
GND
To CNP1
-A141
[MM/11/8A]
Main Circuit Power Supply
DC48V
[MM/01/4A]:(1)
[MM/01/8A]:(2)
-X145P1:1B
-X145P1:5A
1
2 3 4 5 6 7 8 9 10 11 12
A
B
C
D
E
F
G
H
Red
Black
Green
White
Yellow
Red
Black
Green
White
Red
Black
Blue
Blue
Blue
Yellow
White
Red

5OM-1610
4-660911-001A(M916WMM--0012)
U28 POWER SUPPLY PCB
-A141
P24I
CN4C
5
3
4
1
2
-X1414C
7
6
L-Axis 3 Limit (+)
-B01
-B02
L-Axis 3 Limit (-)
L.ON
(+)
(-)
(-)
(+)
L.ON
24B
10B
B02C
B01C
B05C
CN7
B04C
CN3
-X2803
X01
L-Axis 3 Pass Line
(-)
(+)
D.ON
24B1
10B
24F
10F
CN3
DOCOM
2
3
1
DICOM
EMG
-X14503
CN3
-A145
Multi-Axis Board Control Power Unit
-X141P1:6A
24F
10F
CN4D
5
3
4
1
2
-X1414D
7
6
L-Axis 2 Limit (+)
-B01
-B02
L-Axis 2 Limit (-)
L.ON
(+)
(-)
(-)
(+)
L.ON
B02B
B01B
CN6
U28
1
3
2
1
3
2
CN4D
5
3
4
1
2
-X1454D
7
6
L-Axis 1 Limit (+)
-B01
-B02
L-Axis 1 Limit (-)
L.ON
(+)
(-)
(-)
(+)
L.ON
CN5
1
6
BK1
5
3
4
1
2
6
B02A
B01A
1
3
2
1
3
2
1
3
2
1
3
2
1
3
2
B04B
L-Axis 2 Pass Line
(-)
(+)
D.ON
1
3
2
B04A
L-Axis 1 Pass Line
(-)
(+)
D.ON
1
3
2
B05B
-B05
Excessive Pushing Detection 2
:2
:3
:1
(-)
(+)
OUT
1
3
2
B05A
-B05
Excessive Pushing Detection 1
:2
:3
:1
(-)
(+)
OUT
1
3
2
-B05
Excessive Pushing Detection 3
:2
BR
:3
:1
BL
BK
BL
YE
GY
(-)
(+)
OUT
1
3
2
6
3
4
DI06
1
2
3
4
3
4
1
2
5
6
SG
Nozzle up status 2
Nozzle up status 1
TX+
TX-
HEAD STP
CN2
3
1
2
4
5
7
6
5
10B
24B
24B
10B
24B
10B
24B
10B
24B
10B
24B
10B
-B07
-B07
-B07
(+)
(-)
:3
:1
:2
OUT
<Mechatro Tube>
OUT
(-)
(+)
(+)
(-)
OUT
-X28B07A
-X28B07B
-X28B07C
-B07
2
1
3
2
1
3
2
1
3
X02
1
2
Vacuum Sensor 1
Vacuum Sensor 2
Vacuum Sensor 3
B07A
B07B
B07C
10B
24B
CN4
-X2804
5
7
1
3
9
TX
RX
-RX
-TX
1
6
BK2
5
3
4
1
2
6
1
6
BK3
5
3
4
1
2
6
7
12
10F
24F
CN8
3
4
1
2
5
7
12
7
12
6
BK1
BK2
BK3
8
7
4
6
2
8
10
7
CN1
3
1
2
4
5
7
6
10B
10B
24B
24B
8
-X2807
-X2806
-X2805
-X14103
-X28X1
-X2808
-X28X2
-X28B05C
-X28B01C
-X28B02C
-X28B04C
-X28B05B
-X28B01B
-X28B02B
-X28B04B
-X28B05A
-X28B01A
-X28B02A
-X28B04A
U17(CN4)
U17(CN3)
10F
24F
-A141(CNP3)
[MM/11/3F]
-X141P3:1
-X141P3:2
-X141P3:3
-X141P3:4
-A145(CNP3)
[MM/11/9F]
-X145P3:3
-X145P3:4
-X128X2 :1
:2
-X1704:1
-X1704:3
-X1703:1
-X1703:2
[MM/13/3F]
[MM/13/3F]
-A141(CNP1)
[MM/11/3B]
Multi-Axis Board Control Power Unit
-A145(CNP1)
[MM/11/9B]
2
3
1
DI1
DI2
DI3
DO1
DO2
SGI
P24I
DI1
DI2
DI3
DO1
DO2
SGI
P24I
DI1
DI2
DI3
DO1
DO2
SGI
DOCOM
DICOM
EMG
FG
8
N.C
[MM/01/4E]:(1)
[MM/01/8E]:(2)
[MM/01/4D]:(1)
[MM/01/8D]:(2)
HLS
[MM/01/4B]:(1)
[MM/01/8B]:(2)
DC24V
YE
RD
WH
BR
BL
BK
BR
BL
BK
BR
BL
WH
BR
BL
BK
BR
BL
BK
BR
BL
BK
BR
BL
WH
BR
BL
BK
BR
BL
BK
BR
BL
BK
BR
BL
WH
DI00
DI08
DI02
DI10
DI04
DO02
DO03
DI12DI12
DI14
Logic
DO04
DO05
DI13
DI14
-B04
-B04
-B04
-B05
-B05
-B05
TX
RX
-RX
-TX
[MM/13/3A]
HLS
-U17(CN1)
-X1701:2
-X1701:3
-X1701:4
-X1701:5
24F
10F
24B1
10B
-X145P1:6A
-X145P1:6B
-X141P1:6B
24F
10F
BL
YE
GY
BL
YE
GY
<Mechatro Tube>
YE
RD
WH
YE
RD
WH
-X1701:7
:3
:1
:2
<Mechatro Tube>
-B07
:3
:1
:2
<Mechatro Tube>
-B07
:A1
:B1
:A2
-B309
:B2
:A4
:A3
:B3
-X12501:C4
N.C
-X12501:C5
-X12501:D5
-X12501:C6
-X12501:D3
-X12501:D4
-X12501:B1
-X12501:B2
-X12501:B3
-X12501:B4
-X12501:C3
-X131P1:B3
-X131P1:B4
-X131P1:B2
-X131P1:B1
STLT_MHD2
I/O P.C.B
U28
1
2 3 4 5 6 7 8 9 10 11 12
A
B
C
D
E
F
G
H
<Mechatro Tube>
<Mechatro Tube>

5OM-1610
4-670911-001A(M916WMM--0013)
U17 I/O STLT MF HEAD
1 2 3 4 5 6 7 8
A
B
C
D
E
F
RX
/RX
TX
-X1701 -X1702
CN1A/1B
/TX
FG
7 2 43 5
CN2A/2B
IN OUT
3
CN10
2
1
1
2
CN11
3
3
CN12
2
1
3
CN13
2
1
3
CN14
2
1
3
CN15
2
1
3
CN16
2
1
3
CN17
2
1
CN18
2
1
1
2
CN19
1
2
CN20
1
2
CN21
1
2
CN22
1
2
CN23
1 2 3
CN3
21
24B1
10B
10F
24F
5 34 2 7
FG
/TX
TX
/RX
RX
-X1714
-X1713
-X1723
-X1722
-X1721
-X1720
-X1719
-X1718
-891
-892
-893
-894
-895
-896
-X1703 -X1704
Note 1
:4
:2
:8
:6
-X28X2 :7
:8
-X28X2
:4
:3
Control Output
(OPTION)
Bad Mark Detection
Bad Mark Detection
Stability Output
(OPTION)
Blue
Black
Brown
Orange
24V
Control Output
OV
PS-T1
Stability Output
-U28 (Power Supply P.C.B HD)
-X2804(CN4)
[MM/12/2D]
[MM/12/5D]
[MM/12/5D]
STLT_MHD1
I/O P.C.B
-U17
Vacuum Valve 1
:1
:2
-Y1718
-Y1718
-Y1719
-Y1718
:4
:3
:2
:1
:1
:2
Vacuum Breaker 1
Vacuum Valve 2
Vacuum Breaker 2
<Mechatro Tube>
-Y1718
-Y1718
-Y1719
-Y1718
-Y1718
-Y1718
-Y1718
-Y1719
Vacuum Valve 3
Vacuum Breaker 3
:4
:3
:4
:3
:10
-B308
:A1
:A4
:B2
:B1
1 2 3 4 5 6 7 8
A
B
C
D
E
F
1
2
CN24
1
2
CN25
CN4
-X1725
Pink
-B308
:A2
PS-T1
External Tuning
Bad Mark Detection
External Tuning
(OPTION)
<Mechatro Tube>
<Mechatro Tube>
<Mechatro Tube>
<Mechatro Tube>
<Mechatro Tube>