5OM-1626-001_w - 第75页
5OM-1610 091 1-001 2-B
5OM-1610
0911-001 2-A
Chapter 2
Sensor and Load Layout
This chapter indicates where the sensors and loads are located in each
section.
As this contains highly sophisticated contents, it should carefully be
referred to.
5OM-1610
0911-001 2-B
5OM-1610
2-1
Sensor and Load Layout
0911-001
Layout under the Base
S144
Y939
Y0938
Y939
Y0938
M66
Y0938
Y939
Y0938
Y939
Front View
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y06
39 High-Speed/Multi-Functional Head Change-Over Y09
39 High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection