5OM-1626-001_w - 第97页
5OM-1610 2-22 Sensor and Load Layout 091 1-001
5OM-1610
2-21
Sensor and Load Layout
Multi Function Nozzle Stocker Section Layout
0911-001
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
B0622
B0922
Upper Stage : Left View
Lower Srage : Right View
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 Multi Function Nozzle Stocker 2 Ascending 1 Y09
36 Multi Function Nozzle Stocker 1 Ascending 1
B0618 Multi Function Nozzle Stocker 2 B0918 Multi Function Nozzle Stocker 1
Unit Lower Limit Detection 1 Unit Lower Limit Detection 1
B0620 Multi Function Nozzle Stocker 2 B0920 Multi Function Nozzle Stocker 1
Shutter Close Check 1 Shutter Close Check 1
B0622
Multi Function Nozzle Stocker 2 Clamp Check 1 B0922 Multi Function Nozzle Stocker 1 Clamp Check 1
5OM-1610
2-22
Sensor and Load Layout
0911-001
5OM-1610
0911-001 3-A
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should carefully be
referred to.