4M-1751-005w_G5S - 第107页
4OM-1751 1-57 1304-001 5.3 Nozzle Filter Removal Procedure Filter Removing Jig Vacuum Nozzle Push Pushing out the nozzle filter. F4A…
4OM-1751
1-56
5.2 Method of detaching vacuum nozzle
•
Store the nozzle in the nozzle stocker (housing) through window
navigations and take out the nozzle stocker (housing).
Notice
(a) Do not take out a nozzle from the head by hand. Otherwise, the
nozzle does not conform to the nozzle data.
(b) When the ultrasonic cleaning operation is to be performed
underwater, remove the nozzle lter.
Do not use anything other than water for the cleaning.
(c) Demagnetize the vacuum nozzle after the detachment.
Keep the head section free of any magnetic eld.
As an example,
•
Do not bring a magnet close to the head section.
•
Do not bring any demagnetizer to the head section.
Demagnetize the vacuum nozzle each unit.
Reference
Refer to "5. Nozzle Change Window" in "Chapter 6 (Vol. 2)" for the
procedure of nozzle storage.
1304-001
5.2 Method of detaching vacuum nozzle
4OM-1751
1-571304-001
5.3 Nozzle Filter Removal Procedure
Filter Removing Jig
Vacuum Nozzle
Push
Pushing out the nozzle filter.
F4A48
Note
5.3 Nozzle Filter Removal Procedure
4OM-1751
1-58
5.4 Method of Blow air
•
Remove dust and dirt etc.
Clean the tapered area of the vacuum nozzle with a lens cleaning cloth.
Notice
Use clean, dry, and non-lubricated air for blow air.
F4A49
NOTICE
Blow air to the head when blow air to the nozzle.
There is a possibility that the clamp jaw breaks when
the air blow is done from the direction of the clamp
jaw to the nozzle.
1304-001
5.4 Method of Blow air