4M-1751-005w_G5S - 第119页
4OM-1751 1-69 6. Use Procedure of Diusion Plate Setup Jig Procedure Outer Diffusion Plate Inner Diffusion Plate F4A65 (2) Attach the Jigs No. 1 and No. 2…
4OM-1751
1-68
5.7 Nozzle Filter Insertion Procedure
1903-005
Acrylic block
High-speed
nozzle stocker
F4A76A
Note
If nozzles are set in the opposite direction;
replacement jig. Attach the block mount surface of nozzle stocker to the opposite
side.
Nozzle stocker
(opposite direction)
Bottom of jig
Block mount surface
5 bolts
Pin hole
(opposite direction)
F4A78
nozzles.
Metal pusher
F4A77A
4OM-1751
1-69
6. Use Procedure of Diusion Plate Setup Jig
Procedure
Outer Diffusion Plate
Inner Diffusion Plate
F4A65
(2) Attach the Jigs No. 1 and No. 2 onto the three locations as shown in the
Take care not to damage the linear measure sensor.
Jig 1 Jig 2
F4A66
F4A67
1304-001
6. Use Procedure of Diusion Plate Setup Jig
4OM-1751
1-701304-001
7. Consumables and Servicing Parts
7.1 List of Consumables
This component list is for the components that would be worn within one year.
When any of these components are to be purchased, contact Marketing Dept. of
HITACHI High-Technologies or our sales agent.
Product Name Part No. Part Name Q'ty
Recommended
Replacement
Cycle
Recommended
number per year
Note (a)
Remarks
Nozzle (HV82C) KYA-M7782-00
HV82C---
ASSY_NOZZLE(HV82C) 30 One Year 30 Note (e)
Nozzle (HV13C) KYA-M7713-00
HV13C---
ASSY_NOZZLE(HV13C) 30 One Year 30 Note (e)
Nozzle (HA14C) KYA-M7714-A0
HV14C---
ASSY_NOZZLE(HV14C) 30 One Year 30 Note (e)
Nozzle (HA15C) KYA-M7715-A0
HV15C---
ASSY_NOZZLE(HV15C) 30 One Year 30 Note (e)
Nozzle (HV19C) KYA-M7719-A0
HV19C---
ASSY_NOZZLE(HV19C) 30 One Year 30 Note (e)
Nozzle (PA05C) KYB-M7730-A0
PA05C---
ASSY_NOZZLE(PA5C) 30 One Year 30 Note (e)
Nozzle (HG33C) KYA-M7703-A0
HG33C---
ASSY_NOZZLE(HG33C) 30 One Year 30 Note (e)
Nozzle (HG52C) KYA-M7705-00
HG52C---
ASSY_NOZZLE(HG52C) 30 One Year 30 Note (e)
Nozzle (HG24C) KYA-M7702-A0
HG24C---
ASSY_NOZZLE(HG24C) 30 One Year 30 Note (e)
Nozzle (HG82C) KYA-M7708-00
HG82C---
ASSY_NOZZLE(HG82C) 30 One Year 30 Note (e)
Vacuum Filter KYB-M704D-00
225B0572
AIR_CLEAN_EQPT 60 Three weeks 240 Note (h)
Fluorine Sheet KYB-M3T15-00
212A2743
GUIDE 2 One Year 2
Urethane Clamp
ASSY
KYB-M3T17-00
0920715E
KYB-M3T16-00
09207152
ASSY_CLAMPER_Y
ASSY_CLAMPER_K
2
2
One Year 2
2
Seal ASSY
Flat Ring
Set Bolt
KYF-M865T-00
0920716C
KYB-M3T1U-00
0920H159
90990-01J118
0920H158
ASSY_SEAL
SEAL
BOLT,HEX.SOCKET HEAD
2
2
12
One Year 2
2
12
Cutter Unit
Sliding Side
For the Roller
DISK ASSY
Cutter Blade
Cutter Blade
Set Bolt
KYF-M865U-00
0920716D
KYB-M3T1A-00
0920H127
90990-06J004
221A0231
ASSY_DISK
DISK
BOLT,HEX-SCT
4
4
12
One Year 4
4
12
Note (c)
Nozzle Filter KYA-M7702-10
225A0045
AIR CLEAN EQPT 30
(15)
One Week 1000
(500)
Note (d), (h),
(i)
Vacuum Filter KYB-M3823-00
225B0313
AIR_LINE_EQPT 3 Two Months 12 Note (d)
T4A17
7. Consumables and Servicing Parts