SP60P-L Parts list(Mechanical)20120628 - 第104页
12 基 板 上押えユ ニット(L) Bo ar d Fl at ten ing Uni t (L) パーツレイアウト Kit N o . キット品 番 Kit N am e キット名称 KXF X03BVA00 ｾｸｼｮﾝNo. PARTS LAYOUT Section No. - - M85 ( KKXFX03BVA00-04 )
Ref
No.
Remarks
R
1
Q'ty
11-E
マスククリーニングユニット(L)
Mask Cleaning Unit(L)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX03BUA00
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
HOUSING
1
1 KXFB038CA00
MANIFOLD
1
2 N210002141AA
BRACKET
1
3 N210019803AA
BRACKET
1
4 KXFB024JA00
BRACKET
1
5 N210059540AA
BRACKET
1
6 KXFB00LRA00
PW004A0
2
7 KXFB01CCA00
PUMP
1
8 N510048045AA PB1013-01-X31
JOINT
2
9 KXF02BPAA00 KQL04-01S
TANK
1
10 N610010652AA
C-RING
1
11 KXF07ZFAA00 STW-32
TUBE
1
12 KXF0DWU4A00 PN-4-10X6.5 milk-white
FILTER
1
13 N510001105AA UY3/8(mesh40)
BUSH
1
14 KXF0DXZNA00 No.386 M-3/8X1/8 SUS
VALVE
1
15 KXF0E0KWA00 USG3-X0891(DDA)
SILENCER
1
16 N510064382AA AN10-01
NIPPLE
2
17 N510019610AA No.507 21X3/4 SUS
HOSE
1
18 KXF0DWU6A00 Duct EE-type D50
HOSE-BAND
2
19 KXF05QVAA00 ABA band 19-28
FILTER
1
20 N510024186AA
A
VFY036A
VALVE
2
21 N510056193AA ADK11-25X3483
NIPPLE
2
22 N510020198AA V6N-10
JOINT
1
23 N510020199AA VT-10
NIPPLE
2
24 N510020200AA VRN-1008
JOINT
3
25 KXF05HJAA00 KQH08-02S
PLUG
3
26 KXF02CSAA00 KQP-08
TUBE
1
27 KXF0DX38A00 Chemi-flex inner diameter D19
NIPPLE
1
28 KXF0DXJCA00 No.404 1 1/4X34
HOSE
1
29 N510005275AA TAC Eco Duct D32
BAND
2
30 KXF0DZHTA00 VE36
BAND
2
31 KXF0DWUAA00 VE54
JOINT
3
32 KXF0977AA00 CPS15M-8B
JOINT
3
33 KXF09Y3AA00 CPP15-8B
SENSOR
1
34 KXF078BAA00 GT7SN
PLATE
2
35 KXF05EMAA00 GP5-1
BUSH
1
36 N510020201AA (Bu)1X3/4
BUSH
1
37 N510020202AA VBU-1610
NIPPLE
1
38 N510020203AA VRN-1608
JOINT
1
39 N510020204AA (SL)3/4
FILTER
1
40 N510024187AA
A
VFY036A-E
SOCKET
3
41 KXF0DX37A01 SOCKET 11/4(DA KXF0DX37A01)
BAND
3
42 N510019612AA AS-60
Process Pump Kit
1
43 N610113239AA
JOINT
1
44 KXF02BPAA00 KQL04-01S
JOINT
2
45 N510001107AA L4N6X4-PT1/8ST
M84
--
( KKXFX03BUA00-15-5 )
12
基
板
上押えユニット(L)
Board Flattening Unit(L)
パーツレイアウト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX03BVA00
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
--
M85
( KKXFX03BVA00-04 )
Ref
No.
Remarks
R
1
Q't
y
12
基
板
上
押
えユニット(L)
Board Flattening Unit(L)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit No.
キット品
番
Kit Name
キット名称
KXFX03BVA00
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
BAR
3
1 KXFB0386A00
BRACKET
4
2 KXFB033ZA00
BRACKET
4
3 KXFB0340A00
PLATE
4
4 KXFB0341A01
PLATE
4
5 N210065937AB
COLLAR
8
6 KXFB0343A00
PLATE
1
7 N210065938AA
PLATE
1
8 KXFB08J7A00
GUIDE
1
9 KXFB08GXA00
PLATE
2
10 KXFB0347A00
PLATE
1
11 KXFB0348A00
GUIDE
1
12 KXFB08GYA00
BRACKET
1
13 N210044702AA
RAIL
1
14 N610051797AA
SPEED-CONTROLLER
2
15 KXF0E4LEA00 AS2311F-01-04S
LEVER
4
16 N510023061AA LCM-6X20-BK
SPRING
8
17 KXF0DWUDA00 DC540
LINEAR-BUSH
8
18 KXF09S8AA00 LM81524NFUU
SHAFT
8
19 KXF0DWUFA00 NBJ03-8-35-M4-N4
C-RING
16
20 KXF04CUAA00 STW-15
CYLINDER
1
21 KXF09WPAA00 CXSL25-10-Z73LS
WASHER
8
22 KXF09TUAA00 WSSS15-8-1
WASHER
8
23 KXF09TVAA00 WSSS16-5-2
NUT
5
24 N510017869AA
Hexagon nut Type-3 Best class M6-6H-4T A2J (Trivalent)
CAP
2
25 KXF0DWYMA00 ECP-1590-6
CATCH
1
26 KXF09WRAA00 C-1077-B
PLUNGER
1
27 KXF09WSAA00 BSZ6
BOLT
2
28 KXF0DWUGA00 CBSST6-16
SPACER
40
29 N510017105AA CF-402E
SPACER
40
30 N510020086AA 3382330-40050
PIN
1
31 KXF02XVAA00 MS3-10
BAR
1
32 N210065113AA
BRACKET
1
33 N210065115AA
M86