第五卷 资 料 - 第74页
3-20 元件配置图 5OM-1752 1306-002 侧面面板前 外侧 TB : AC1 F200 Symbol Name Remarks F200 Lightning Surge Protecter

3-19
元件配置图
5OM-1752
1306-002
侧面面板前 内侧
K10
K28
K29
Q205
Q206(30A)
Q221(30A)
TB:AC2
Symbol Name Remarks
Q205 CirCuit Protecter Vacuum pump
Q206 CirCuit Protecter
Q221 CirCuit Protecter
K29 EM-CONTACTOR Vacuum pump Power Suppry
K28 EM-CONTACTOR CPU Power Suppry
K10 EM-CONTACTOR G2 Power Suppry

3-20
元件配置图
5OM-1752
1306-002
侧面面板前 外侧
TB : AC1
F200
Symbol Name Remarks
F200 Lightning Surge Protecter

3-21
元件配置图
5OM-1752
1306-002
侧面面板中
4
4
K33A
K33B
R04F R04B
Symbol Name Remarks
K33A EM-CONTACTOR
K33B EM-CONTACTOR
R04F RESISTOR_SPECIAL X1 (Front) Axis Motor Regenerative Resistor
R04B RESISTOR_SPECIAL X1 (Rear) Axis Motor Regenerative Resistor