SG_FSE_SiplaceHF_HF3_00193901-05_eng - 第195页

1 - 29 S tudent Guide SIPLACE HF/HF3 Edition 09/2005 5 Gantry 29 5.5.3.1 T est setup Please Note: The test setup for the Y -Axis is the same as the X-Axis. 5 Fig. 5.5 - 6 Dynamic Signals at 15000 digit distance of Y -Axi…

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Student Guide SIPLACE HF/HF3
5 Gantry Edition 09/2005
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Table 5.5 - 1 Positioning time X-Axes
For a direct comparision of the axes types: Here the positioning time table for the Y-Axes.
5.5.3 Check dynamic Y-axis
X-Axes with DLM2 (C&P6, C&P12) Head X-Axes with TWIN-Head
Distance /
Digit
Timet / ms Tolerance /ms
Distance /
Digit
Time / ms Tolerance /ms
500 26 +/-5 500 26 +/-5
1000 28 +/-5 1000 28 +/-5
2000 34 +/-5 2000 34 +/-5
5000 47 +/-5 5000 45 +/-5
15000 60 +/-5 15000 55 +/-5
20000 63 +/-5 20000 61 +/-5
50000 90 +/-10 50000 90 +/-10
100000 125 +/-10 100000 125 +/-10
200000 175 +/-10 200000 175 +/-10
300000 215 +/-15 300000 215 +/-15
Y-Axes with DLM2 (C&P, C&P12) Head Y-Axes with Twin Head
Distance /
Digit
Time / ms Tolerance /ms
Distance /
Digit
Time / ms Tolerance /ms
500 38 +/-5 500 41 +/-5
1000 42 +/-5 1000 44 +/-5
2000 45 +/-5 2000 49 +/-5
5000 50 +/-5 5000 54 +/-5
15000 66 +/-5 15000 71 +/-5
20000 75 +/-5 20000 79 +/-5
50000 102 +/-10 50000 111 +/-10
100000 143 +/-10 100000 147 +/-10
200000 200 +/-10 200000 203 +/-10
600000 366 +/-20 600000 368 +/-20
Table 5.5 - 2 Positioning time Y-Axes
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Student Guide SIPLACE HF/HF3
Edition 09/2005 5 Gantry
29
5.5.3.1 Test setup
Please Note:
The test setup for the Y-Axis is the same as the X-Axis. 5
Fig. 5.5 - 6 Dynamic Signals at 15000 digit distance of Y-Axis C&P head on top and Twin head at bottom
Legend
3
2
1
(1) Start of the axis (2) Twin head reach the nominal position later,
(3) Overshot is smaller than the ’allowed deviation of posi-
tion at the Twin head--> end signal only a little delayed
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Student Guide SIPLACE HF/HF3
5 Gantry Edition 09/2005
30
Please Note:
The allowed deviation of position at the C&P head is 10µm and at the twin head 5µm.
Fig. 5.5 - 7 Dynamic Signals at 20000 digit distance of Y-Axis C&P head on top and Twin head at bottom
Legend
3
2
1
(1) Start of the axis (2) Twin head reach the nominal position a little later,
Overshot control don‘t happen.
(3) actual pos. is nominal position signal and end signal at the same time following overshots smaller than
the allowed dev. of pos.