SP-039-004e.pdf - 第7页

G -S172-03,10,13,16 0805-002 For G -S172-03 Front 1 3 2 4 Rear HH-G300 PCB Height Measurement Feedback Function For G -S172-10 Front 1 3 2 4 Rear HH-G300 HM-G300 PCB Height Measurement Feedback Function For G -S172-13 Fr…

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G -S172-03,10,13,16
0805-002
ビームX部Fig.CX BEAM X SECTION
ヘッド部Fig.M HEAD SECTION
架台上全体Fig.D
OVERALL UPPERFRAME
G -S172-03,10,13,16 G -S172-03,10,13,16
基板高さ測定フィードバック
PCB Height Measurement
機能
(GXH-3)
Feedback Function(GXH-3)
UNIT-1
G -S172-03,10,13,16
0805-002
For G -S172-03
Front
1 3
2 4
Rear
HH-G300
PCB Height
Measurement
Feedback Function
For G -S172-10
Front
1 3
2 4
Rear
HH-G300
HM-G300
PCB Height
Measurement
Feedback Function
For G -S172-13
Front
1 3
2 4
Rear
HH-G300
HM-G300
PCB Height
Measurement
Feedback Function
For G -S172-16
Front
1 3
2 4
Rear
HH-G300
PCB Height
Measurement
Feedback Function
G -S172-03,10,13,16 G -S172-03,10,13,16
基板高さ測定フィードバック
PCB Height Measurement
機能
(GXH-3)
Feedback Function(GXH-3)
UNIT-2
G -S172-03,10,13,16
0909-003
ビーム
X
部
BEAM X SECTION
Fig. CX-2
ケーブルラック
1,4
Cable Rack 1,4
117
115
1
18
1
19
120
131
132
103
105
133
134
148
136
135
137
140
147
157
177
154
.
173
.
166
153
.
173
.
166
158
.
174
.
167
152
.
173
.
166
152
.
173
.
166
159
.
174
.
167
151
.
171
.
165
154
.
173
.
166
155
.
173
.
166
158
.
174
.
167
153
.
173
.
166
154
.
173
.
166
154
.
173
.
166
153
.
173
.
166
153
.
173
.
166
153
.
173
.
166
BLOCK1
144
Special Specifications
G -S172-03,10,13,16
121
124
125
173
158
.
174
.
167
154
.
173
.
166
141-01
141-02
141-06
129
141-03
.
141-04
.
141-05
109
.
1
10
.
1
11
X6401
X16401
U64
141
CX-2 illust-1