CM602all_EJM8AESM_Service Manual - 第213页
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles) Remarks Item Press [Unlock] and [Nzl angleOrgOffset] simultaneously. An offset for each θ angle origin is entered. Teach in the following order: Positions 4…
Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Item
Move the jig from 3 to Nozzle 6.
Press [Unlock] and [Run] simultaneously.
Nozzle Position 6 is recognized and
taught automatically. The recognition
position offset will be entered.
Press [Unlock] and [Jig setting] simultaneously.
The head moves to the jig setting
position (over the NG box).
Set the jig.
Move the jig to Nozzle
Position 4.
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Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Item
Press [Unlock] and [Nzl angleOrgOffset] simultaneously.
An offset for each θangle origin is
entered.
Teach in the following
order: Positions 4, 5, 6, 7,
8, 1 and 2, repeating
Steps 10 to 12.
Press [Unlock] and [Jig remove] simultaneously.
The head moves to the jig setting
position (over the NG box).
Remove the jig from
Position 2, which is the
last position.
Press the [Return] key.
Press [Unlock] and [Run] simultaneously.
All axes of the selected stage return to
the origin.
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Maintenance Adjustment Light Transfer-Head Assembly (8 nozzles)
Remarks
Item
Offsets are entered in the screens below:
Offset range
X, Y&θ offset
(High, Middle & Low speeds)
X ：-5.0 to +5.0
Y ：-5.0 to +5.0
θ ：-0.1 to +1.0
* Reverse scan offset
(High, Middle & Low speeds)
Reverse scan：0.0 to 0.75
* Magnifying power
X Mag. ：0.017 to 0.018
Y Mag. ：0.017 to 0.018
* Head angle origin
θ: -5.0 to +5.0
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