CM602all_EJM8AESM_Service Manual - 第266页
Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles) Remarks Item Press the [Return] key. Press [Unlock] and [Run] simultaneously. All axes of the selected stage return to the origin. The offsets are entered a…
Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press [Unlock] and [Jig setting] simultaneously.
The head moves to the jig set position
(over the NG box).
Remove the jig from
Head 3.
Set the jig.
Set the jig on Head 2.
Press [Unlock] and [Nzl anglOrgOffset] simultaneously.
The theta-axis origin offset for each head
is entered.
Teach Heads 1 and 2,
following Steps 7 to 9.
Press [Unlock] and [Jig remove] simultaneously.
The head moves to the jig set position
(over the NG box).
Remove the jig from
Head 2.
10
12
11
9
EJM8A-E-SMA040304-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press the [Return] key.
Press [Unlock] and [Run] simultaneously.
All axes of the selected stage return to
the origin.
The offsets are entered automatically into the screens below:
Offset range:
X, Y&θ offset
(High, Middle & Low speeds)
X ：-5.0 to +5.0
Y ：-5.0 to +5.0
θ ：-0.1 to +1.0
* Reverse scan offset
(High, Middle & Low speeds)
Reverse scan：0.0 to 0.75
* Magnifying power
X Mag. ：0.017 to 0.018
Y Mag. ：0.017 to 0.018
* Head angle origin
θ: -180 to +180
16
14
15
13
EJM8A-E-SMA040304-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
This section describes the procedures for determining the mounting height and for positioning the board.
Tools
None
Jig
FM-1074
Board jig 50 mm x 50 mm
(with a hole)
Nozzle 1003
4-3-5 Determining the Mounting Height and Positioning the Board
Remove the support pins beforehand.
10±0.05㎜
10±0.05㎜
50㎜
50㎜
t= 3.0㎜
10 +/- 0.05 mm
10 +/- 0.05 mm
50 mm
50 mm
t= 3.0 mm
Assembly
A
d
j
ustment
min.
Teaching
5 min.
Total Time Weight of
Part
Removal
Disassembl
y
min.
5 min.
kgs
Caution
Dange
r
Warning
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