CM602all_EJM8AESM_Service Manual - 第294页
Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles) This section describes the procedures for determining the nozzle exchange position. ・ Tools None ・ Jig FM-0727 Position Teaching Jig Nozzle 1003 4-3-9 Nozzl…
Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Item
Press the "Return" key.
To save the machine
parameters, press the
"Return" key.
Press [Unlock] and [Run] simultaneously.
The axes for the selected stage move to
the origin.
Offsets are entered into the screen below:
Offset range:
X=±1.0㎜
Y=±1.0㎜
Z=±1.0㎜
9
10
11
EJM8A-E-SMA040308-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
This section describes the procedures for determining the nozzle exchange position.
・Tools
None
・Jig
FM-0727
Position Teaching Jig
Nozzle 1003
4-3-9 Nozzle Exchange Position
Remove the support pins beforehand.
Assembly
A
d
j
ustment
min.
Teaching
5min.
Total Time Weight of
Part
Removal
Disassembl
y
min.
5min. kgs
Caution
Dange
r
Warning
EJM8A-E-SMA040309-A01-00
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Maintenance Adjustment Light Transfer-Head Assembly (3 nozzles)
Remarks
Press [Nozzle exchange pos].
Select the stage to be taught.
Press [Unlock] and [Jig setting] simultaneously.
The head assembly moves away and the
nozzle changer cover opens.
Set the jigs into the nozzle changer.
Take care with the orientation of the jig. Set the jigs into Nos. 11
and 35 of the nozzle
changer.
Put Nozzle 1003 onto
Head 3.
3
4
1
Item
2
should face
upwards
EJM8A-E-SMA040309-A01-00
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