CM602all_EJM8AESM_Service Manual - 第340页
Machinery Part Replacement Main Body This section describes the procedures for replacing the vacuum pump fan. ・ Tools Phillips screwdriver #2 Allen key 4 mm Allen key 6 mm ・ Jig None 5-1-5 Vacuum Pump Cooling Fan Replace…
Machinery Part Replacement Main Body
Remarks
Item
Put the bottom cover back on.
Phillips screwdriver #2
Screw M4 4 pcs.
Put the lower chute back on.
Allen key 4 mm
Screw M5x12mm 4 pcs.
Thick washer 4 pcs.
21
22
Chute holding
section (left)
Chute holding
section (right)
EJM8A-E-SMA050104-A01-00
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Machinery Part Replacement Main Body
This section describes the procedures for replacing the vacuum pump fan.
・Tools
Phillips screwdriver #2
Allen key 4 mm
Allen key 6 mm
・Jig
None
5-1-5 Vacuum Pump Cooling Fan Replacement
Assembly
Adjustment
10min.
Teaching
min.
Total Time Weight of
Part
Removal
Disassembly
10min.
20min. kgs
Caution
Dange
r
Warning
EJM8A-E-SMA050105-A01-00
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Machinery Part Replacement Main Body
Remarks
Switch off the main power.
Turn the switch to the left.
Remove the connector.
Connector No. FANAP
Remove the earth cable.
Phillips screwdriver #2
Screw M4 1 pc.
Remove the fan holding bolts.
Allen key 6 mm
Bolt M8 2 pcs.
2
3
4
1
Item
EJM8A-E-SMA050105-A01-00
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