CM602all_EJM8AESM_Service Manual - 第341页
Machinery Part Replacement Main Body Remarks Switch off the main power. Turn the switch to the left. Remove the connector. Connector No. FANAP Remove the earth cable. Phillips screwdriver #2 Screw M4 1 pc. Remove the fan…
Machinery Part Replacement Main Body
This section describes the procedures for replacing the vacuum pump fan.
・Tools
Phillips screwdriver #2
Allen key 4 mm
Allen key 6 mm
・Jig
None
5-1-5 Vacuum Pump Cooling Fan Replacement
Assembly
Adjustment
10min.
Teaching
min.
Total Time Weight of
Part
Removal
Disassembly
10min.
20min. kgs
Caution
Dange
r
Warning
EJM8A-E-SMA050105-A01-00
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Machinery Part Replacement Main Body
Remarks
Switch off the main power.
Turn the switch to the left.
Remove the connector.
Connector No. FANAP
Remove the earth cable.
Phillips screwdriver #2
Screw M4 1 pc.
Remove the fan holding bolts.
Allen key 6 mm
Bolt M8 2 pcs.
2
3
4
1
Item
EJM8A-E-SMA050105-A01-00
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Machinery Part Replacement Main Body
Remarks
Item
Remove the fan guard.
Allen key 4 mm
Bolt M5 4 pcs.
Replace the fan guard.
Fit the fan onto the main body frame.
Allen key 6 mm
Bolt M8 2 pcs.
Put the earth cable back on.
7
8
5
6
EJM8A-E-SMA050105-A01-00
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