CM602all_EJM8AESM_Service Manual - 第459页
Machinery Part Replacement Remarks Light Transfer-Head Assembly (8-nozzle type) Item Vacuum/Air Tube Layout 7 TOP MC15CX FRONT RIGHT SIDE MC14CX#1 Θ MOTOR BOTTOM LEFT SIDE BACK MC14CX#2 Head Camera 真空用配管 VACUUM TUBE AIR …
Machinery Part Replacement
Remarks
Light Transfer-Head Assembly (8-nozzle type)
Item
Block Chart
6
MC14CX#1
CN1
CN9
CN12
CN10
CN7
CN6
CN5
CN2
CN3
CN4
MC15CX
MC14CX#2
CN1
CN9
CN12
CN10
CN7
CN6
CN5
CN2
CN3
CN4
CN10
CN6
CN4
CN9
CN12
CN5
CN3
CN1
CN7
CN2
CN8
M
θ-axis
Motor
CN11
Z1-axis Motor
Z2-axis Motor
Z3-axis Motor
Z4-axis Motor
M
M
M
M
Vacuum Valves VL11 to VL14
Vacuum Sensors 1 to 4
Cooling Fan 1
Blow Valves 1 to 4
M
Z5-axis Motor
Z6-axis Motor
Z7-axis Motor
Z8-axis Motor
M
M
M
M
Vacuum Valves VL15 to VL18
Vacuum Sensors 5 to 8
Blow Valves 5 to 8
CPU
BOX
DC
Power
Supply
I/O
Board
24V
EJM8A-E-SMA050312-A01-00
Page 5-3-12-4
Machinery Part Replacement
Remarks
Light Transfer-Head Assembly (8-nozzle type)
Item
Vacuum/Air Tube Layout
7
TOP
MC15CX
FRONT RIGHT SIDE
MC14CX#1
ΘMOTOR
BOTTOM
LEFT SIDEBACK
MC14CX#2
Head Camera
真空用配管
VACUUM TUBE
AIR TUBE
ｴｱｰ配管
EJM8A-E-SMA050312-A01-00
Page 5-3-12-5
Machinery Part Replacement
This section describes the procedures for removing the theta unit.
・Tools
Phillips screwdriver #1
Allen key 2.5 mm
Allen key 3 mm
Allen key 4 mm
Nipper
・Jig
None
Light Transfer Head Assembly (8-nozzle type)
5-3-13 Theta Unit Removable
Caution
Danger
Warning
Assembly
A
d
j
ustment
15min.
Teaching
77min.
Total Time Weight of
Part
Removal
Disassembl
y
15min.
107min.
kgs
EJM8A-E-SMA050313-A01-00
Page 5-3-13-1