CM602all_EJM8AESM_Service Manual - 第464页

Machinery Part Replacement Remarks Transfer Head Assembly (8-nozzle type) Item Remove the theta-unit holding screws. 1-000333 Allen key 4 mm Screw M5 4 pcs. Disassembled theta unit Insert the plate and move down the shaf…

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Machinery Part Replacement
Remarks
Transfer Head Assembly (8-nozzle type)
Item
Remove the vacuum tubes and the valve connectors.
Both front and rear sides.
Remove the valves. (front and rear sides)
Both front and rear sides. Phillips screwdriver #1
Valve holding screw
16 pcs.
Remove the vacuum sensor.
Both front and rear sides. Allen key 2.5 mm
Screw M3 8 pcs.
Insert the plate and move down the shaft 20 mm or more.
Spacer 5 mm or thicker
11
12
9
10
EJM8A-E-SMA050313-A01-00
Page 5-3-13-4
Machinery Part Replacement
Remarks
Transfer Head Assembly (8-nozzle type)
Item
Remove the theta-unit holding screws.
1-000333
Allen key 4 mm
Screw M5 4 pcs.
Disassembled theta unit
Insert the plate and move down the shaft 20 mm or more.
Installation starts with this step.
Spacer 5 mm or thicker
Secure the theta unit, aligning it with the dowel pin.
1-000333
Allen key 4 mm
Screw M5 4 pcs.
13
15
16
14
Dowel pin
EJM8A-E-SMA050313-A01-00
Page 5-3-13-5
Machinery Part Replacement
Remarks
Transfer Head Assembly (8-nozzle type)
Item
Fit the vacuum sensor.
Allen key 2.5 mm
Screw M3 8 pcs.
Connect the valves. (front and rear sides)
Phillips screwdriver #1
Valve holding screw
16 pcs.
17
20
18
Connect the vacuum tubes and the valve connectors.
Connect the valve and the vacuum sensor connectors.
19
CN1
CN2
CN3 CN4
CN5
CN12
CN10CN9
CN7
CN6
MC14CX
The same boards are installed at
the front and the rear sides
of the head assembly
EJM8A-E-SMA050313-A01-00
Page 5-3-13-6