EUKYX-199-5100_G5S2_Instruction_Vol5_E - 第67页
EUKYX 1-18 199-5100 2.7 Nozzle Stocker 2. 7 Nozzle St ocker 9 4 5 6 No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q’ty 4 Solenoid V alve 1 5 Cylinder 1 6 Cylinder 1 9 Union Y

EUKYX
1-17199-5100
2.6 Positioning Unit (In Drop Prevention Unit Attachment)
2.6 Positioning Unit (In Drop Prevention Unit Attachment)
No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q’ty
7 Solenoid Valve 1
9 Cylinder 2
10 Solenoid Valve 1
11 Cylinder 2
9
7
9
9
10
11
11

EUKYX
1-18199-5100
2.7 Nozzle Stocker
2.7 Nozzle Stocker
9
4
5
6
No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q’ty
4 Solenoid Valve 1
5 Cylinder 1
6 Cylinder 1
9 Union Y

EUKYX
1-19199-5100
2.8 Head Unit
2.8 Head Unit
3
5
4
6
No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q’ty
3 Solenoid Valve 1
4 Rotary Joint 1
5 Solenoid Valve 15
6 Filter 15