EUKYX-199-5100_G5S2_Instruction_Vol5_E - 第83页
EUKYX 2-1 1 199-5100 1.1 1 Head Section Layout (Nozzle Selection Section) 1 . 11 Head S ection L ayout ( Nozzle Sele ction Se ction ) M32 B0502 Symbol Name Symbol Name M32 Nozzle Selection (NS) Motor B0502 Nozzle Selecti…
EUKYX
2-10199-5100
1.10 Head Section Layout (Head Rotation Section)
1.10 Head Section Layout (Head Rotation Section)
U37
Y0601-Y0615
U03
M31
U04
1.6x6
1.6x3
1.6x3
1.6x4 1.6x41.6x4 1.6x4
1.6x4
1.6x3 1.6x3
2x4
1.6x4
1.6x3
Symbol Name Symbol Name
U37 Slip Ring
M31 Head Rotation (DD) Motor
U04 Side View Camera (Light Emission)
U03 Side View Camera (Light Reception)
Y0601-Y0615 Vacuum Changeover Valve 1 to 15
EUKYX
2-11199-5100
1.11 Head Section Layout (Nozzle Selection Section)
1.11 Head Section Layout (Nozzle Selection Section)
M32
B0502
Symbol Name Symbol Name
M32 Nozzle Selection (NS) Motor
B0502 Nozzle Selection Position Detection
EUKYX
2-12199-5100
1.12 Head Section Layout (Nozzle U/D Section)
1.12 Head Section Layout (Nozzle U/D Section)
B0503
M34
Symbol Name Symbol Name
M34 Nozzle U/D (NL) Motor
B0503 Interlock Sensor