EUKYX-199-5100_G5S2_Instruction_Vol5_E - 第85页
EUKYX 2-13 199-5100 1.13 Head Section Layout (Head U/D Section) 1.1 3 Head Section L ay out ( Head U / D Section ) M33 B071 1 Symbol Name Symbol Name M33 Head U/D (HL) Motor B071 1 Head U/D (-) Limit
EUKYX
2-12199-5100
1.12 Head Section Layout (Nozzle U/D Section)
1.12 Head Section Layout (Nozzle U/D Section)
B0503
M34
Symbol Name Symbol Name
M34 Nozzle U/D (NL) Motor
B0503 Interlock Sensor
EUKYX
2-13199-5100
1.13 Head Section Layout (Head U/D Section)
1.13 Head Section Layout (Head U/D Section)
M33
B0711
Symbol Name Symbol Name
M33 Head U/D (HL) Motor
B0711 Head U/D (-) Limit
EUKYX
2-14199-5100
1.14 Nozzle Stocker Section Layout
1.14 Nozzle Stocker Section Layout
B_CMP1
B_DWN1
B_SH1
Y_OP1
Y_SH
Symbol Name Symbol Name
Y_SH Nozzle Stocker 2 Shutter Open/Close 1
Y_UP1 High-speed Nozzle Stocker 2 Ascending 1
B_DWN1
High-speed Nozzle Stocker 2 Unit Lower Limit Detection 1
B_SH1
High-speed Nozzle Stocker 2 Shutter Close Check 1
B_CMP1 High-speed Nozzle Stocker 2 Clamp Check 1