00900068-02_SM_ASM_ProcessLens_EN - 第55页

ASM Proces sLens Single - l ane 03/2020 Edit ion 55 Ke y: 1) TSP400 version num ber Figure 3- 66 : TSP400 version number 5. Check that the Vers ion of the circ uit board is of number 6 an d abo ve. See l abel. Installati…

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Key:
1) Switches
2) TSP400
Figure 3-64: Switch at TSP400
3. Check whether the switches on the circuit board are in the right "ON" or "OFF" position.
Number Position of the switch (ON/OFF)
1 OFF
2 OFF
3 OFF
4 OFF
5 ON
6 ON
7 OFF
8 ON
Table 3-3: Position of the switch at the TSP400
Key:
1) Jumper
Figure 3-65: Jumpers at TSP400
4. Check that the jumpers are in place as shown in the picture above.
ASM ProcessLens Single-lane 03/2020 Edition
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Key:
1) TSP400 version number
Figure 3-66: TSP400 version number
5. Check that the Version of the circuit board is of number 6 and above. See label.
Installation
Follow the removal instructions in section “Removing the TSP400” in reverse order for installation.
ASM ProcessLens Single-lane 03/2020 Edition
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4 Machine - Calibrations
The calibration sequence and tests´ objectives of the ProcessLens are listed below.
Step Procedure Functional check Tooling
1.
•
Verify the 2D and 3D optical focal planes
• Grating check
• Scale
• Rotation
• Zero reference
• Resolution specification: 3.716 +/- 1%
(3.6788 to 3.7532) um/pixel
• Camera Rotational specification: not
exceeding ± 0.5°
2D/3D Calibration tool
2.
•
Capture the zero position of the machine
None
3.
•
Positional accuracy check of stop position
after a move
• Objective: Delta offset from target ≤ 10µm
One Point Dynamic jig
4.
•
XY mapping
• Gantry alignment
• Objective: Delta of Gantry to fiducials´
positions ≤ 20µm
Note:
1. Left to Right and Right to Left Mapping
procedures are same.
Left-Right Transport - input mapping
plate from left
Right-Left Transport - input mapping
plate from right
2. ONLY perform when necessary
SIPLACE Mapping
plate Version 5
Coaxial light
5.
•
Same as in Step 1
2D/3D Calibration tool
6.
•
Height calibration Objective: Cg and Cgk >
1.33 for all the 9 areas of the FOV
Certified height
ceramic target