00900068-02_SM_ASM_ProcessLens_EN - 第56页
ASM Proc e ssLe ns Sing le - l ane 03/2 020 Ed ition 56 4 Machin e - Calibrations The calibrat ion s equence and tests ´ objec tives of the Proc essLens are l isted belo w. Step Proced ure Functional check Tooling 1. • V…
ASM ProcessLens Single-lane 03/2020 Edition
55
Key:
1) TSP400 version number
Figure 3-66: TSP400 version number
5. Check that the Version of the circuit board is of number 6 and above. See label.
Installation
Follow the removal instructions in section “Removing the TSP400” in reverse order for installation.
ASM ProcessLens Single-lane 03/2020 Edition
56
4 Machine - Calibrations
The calibration sequence and tests´ objectives of the ProcessLens are listed below.
Step Procedure Functional check Tooling
1.
•
Verify the 2D and 3D optical focal planes
• Grating check
• Scale
• Rotation
• Zero reference
• Resolution specification: 3.716 +/- 1%
(3.6788 to 3.7532) um/pixel
• Camera Rotational specification: not
exceeding ± 0.5°
2D/3D Calibration tool
2.
•
Capture the zero position of the machine
None
3.
•
Positional accuracy check of stop position
after a move
• Objective: Delta offset from target ≤ 10µm
One Point Dynamic jig
4.
•
XY mapping
• Gantry alignment
• Objective: Delta of Gantry to fiducials´
positions ≤ 20µm
Note:
1. Left to Right and Right to Left Mapping
procedures are same.
Left-Right Transport - input mapping
plate from left
Right-Left Transport - input mapping
plate from right
2. ONLY perform when necessary
SIPLACE Mapping
plate Version 5
Coaxial light
5.
•
Same as in Step 1
2D/3D Calibration tool
6.
•
Height calibration Objective: Cg and Cgk >
1.33 for all the 9 areas of the FOV
Certified height
ceramic target
ASM ProcessLens Single-lane 03/2020 Edition
57
Before starting the calibration procedures, reset machine kinematics to default values.
4.1 Calibrations - 2D and 3D Calibration
The objectives are:
•
Z axis Calibration: Auto Focus
•
Calibrate camera to gantry XY rotation
•
2D Calibration
•
3D Calibration
One side of the calibration tool is for 3 dimensional and the other 2 dimensional. The 2D target is
wired with a lighting module.
2D and 3D Calibration tool
1. Check the calibration tool. Clean with a lint free cloth if necessary.
2.
Coil the 2D light cable into the cavity as shown.
1) 2D back light cable and
connector.
3D Calibration Target 2D Calibration Target