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ASM Proces sLens Single - l ane 03/2020 Edit ion 81 Refer to the ta rget heig ht certificate: ● The ser ial num ber of the ta rget m ust m atch the ser ial num ber stat ed on the c ertifi cate. ● The Expec t Heigh t vari…

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Magnified side view of the height target.
The target is a raised disc against a flat
substrate.
Certified glass height target in fixture.
Teach and Verify Sequences:
The camera moves over the target and captures the target at 9 different positions of the FOV (Field
of View). In each FOV position, the camera measures the Golden target 50 times to determine the
average value, calibrate the height measurements across the FOV, and determine the repeatability
for each position.
Before running this calibration it is assumed:
● The 2D and 3D calibration procedure is performed again. See calibration flow.
● Correct top.dev file is installed.
Run times:
The calibration run will take approximately 18 minutes
● The verification run will take approximately 15 minutes
Step 1
Check the data correctness of the top.dev file. The top.dev file is a configuration file that
contains the details of the calibration target mechanical dimensions.
Each manufactured glass target comes with a certificate and a top.dev file of that glass target.
The nominal design height of the target is 120µm, but can vary by a few microns due to
manufacturing
Copy the top.dev file to:
C:\wineagle\system\Calibration\DataFile\01-D10373(SPI)\
GoldenUnitCompensate
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Refer to the target height certificate:
● The serial number of the target must match the serial number stated on the certificate.
● The Expect Height variable in the top.dev file must be equal to the height of the target stated in
the certificate.
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Check the contents of the top.dev file:
1. Open up the top.dev file using a text
editor.
2. Change the Expect Height to be the same
as that stated in the target´s certificate. The
Expect Height must be equal to the
calibrated height in µm stated in the
certificate.
3. In this example, change the Expect Height
to the height of the target 119.8µm as stated
in the certificate.