M3_MaintenancePartsList - 第4页
2 Maintenance Parts FEB./2003 Y -axis 2 1 3 Feeder Holder 1 2 3 No . Part No. Part Name Q'ty Remarks Rank 1 90K61-111500 AC SERVO MOTOR 1 Y 1 B 2 LC2-M653A-00X SENSOR, 1 ASSY(L=550) 1 Origin B 3 LC2-M653E-00X SENSOR…

1
Maintenance Parts
FEB./2003
Base
X-axis
21
1
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KG7-M8501-40X FILTER ELEMENT 1 CRK554 A
2 KG7-M8502-40X MIST FILTER ELEMENT 1 CRK556 A
No. Part No. Part Name Q'ty Remarks Rank
1 90K61-111500 AC SERVO MOTOR 1 X1 B
2 LC2-M653L-00X SENSOR, 8 ASSY(L=350) 1 Origin B
3 LC2-M653M-00X SENSOR, 9 ASSY(L=350) 1 2nd Limit B

2
Maintenance Parts
FEB./2003
Y-axis
2
1
3
Feeder Holder
1
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 90K61-111500 AC SERVO MOTOR 1 Y1 B
2 LC2-M653A-00X SENSOR, 1 ASSY(L=550) 1 Origin B
3 LC2-M653E-00X SENSOR, 2 ASSY(L=550) 1 2nd Limit B
No. Part No. Part Name Q'ty Remarks Rank
1 LG0-M34A0-00X SOCKET, COUPLER 16 Air Coupler C
2 KGN-M4474-00X
FEEDER BANK BOARD ASSY 1B
3 KGN-M4476-00X
FEEDER POWER BOARD ASSY 1B

3
Maintenance Parts
FEB./2003
Head
1
56 4
6
9
7
10, 13
2
3
11
12
7
5
8
No. Part No. Part Name Q'ty Remarks Rank
1 LC2-M7138-00X BELT, R 1 A
2 90990-17J010 O-RING 4 (Y090581) A
3 K46-M8527-C0X FILTER (SZ65111) 4 (SZ65111) A
4 KG7-M7137-A0X LEAF SPRING 8 A
5 KG7-M7169-00X SCREW 8 A
6 KG7-M7170-00X WASHER 8 A
7 90K55-3U0751 AC SERVO MOTOR 1 Z1,Z2,Z3,Z4 B
8 90K61-001L00 AC SERVO MOTOR 1 R1 B
9 LC2-M7120-00X SHAFT, HEAD SUB ASSY 4 C
10 KGB-M7163-A0X EJECOTR 1 Spare(Ejector) C
11 KM1-M7163-20X VALVE 1 Spare(Blow) C
12 KM1-M7163-30X VALVE 1 Spare(Operate) C
13 KM5-M7174-11X EJECTOR 1 Spare(Ejector w/o Blow) C