yvp_xg_mpl_e - 第4页
2 Maintenance Parts AUG./2002 SZ-axis No . Part No. Part Name Q'ty Remarks Rank 1 KW3-M2211-00X BELT, SZ 1 Belt for SZ axis A 2 KW3-M2221-00X SPRING 1 1 A 3 KW3-M653A-10X SENSOR, 1-1 ASSY. 1 Origin (EE-SX871R) B 4 K…
1
Maintenance Parts
AUG./2002
Base
Top Cover
No. Part No. Part Name Q'ty Remarks Rank
1 KG7-M8501-40X FILTER ELEMENT 1 Spare A
2 KG7-M8502-40X MIST FILTER ELEMENT 1 Spare A
3 KG2-M8582-40X VALVE 7 A040-4E1 (Spare) B
4 KV8-M9212-00X VALVE 1 Operate valve for Ejector B
No. Part No. Part Name Q'ty Remarks Rank
1 K93-M1386-00X CYLINDER 1 NSA16X15N-1 B
1
2
3
4
1
2
Maintenance Parts
AUG./2002
SZ-axis
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M2211-00X BELT, SZ 1 Belt for SZ axis A
2 KW3-M2221-00X SPRING 1 1 A
3 KW3-M653A-10X SENSOR, 1-1 ASSY. 1 Origin (EE-SX871R) B
4 KG2-M8582-40X VALVE 2 A040-4E1 (Spare) B
5 KW3-M2259-00X SPG 2 2 A
6 90K55-523784 AC SERVO MOTOR 1 SZ axis B
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1
5
2
5
1
4
3
3
Maintenance Parts
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SY-axis:Base
■
SY-axis:Mask Clamp
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2
1
1
1
2
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin, Limit (EE-SX871R) B
2 90K55-741D43 AC SERVO MOTOR 1 Y axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M2623-A0X SENSOR MASK, ASSY. 2 Mask Check B
2 KGJ-M2619-00X CYLINDER, MASK 4 Mask Clamp B
3 KL0-M655G-30X SENSOR, 1-4 ASSY. 1 Mask Clamp (ZE202A) B