yvp_xg_mpl_e - 第5页
3 Maintenance Parts ■ SY -axis:Base ■ SY -axis:Mask Clamp 1 2 1 1 1 2 2 3 No. Part No. Part Name Q'ty Remarks Rank 1 KW3-M653A-10X SENSOR, 1-1 ASSY . 2 Origin, Limit (EE-SX871R) B 2 90K55-741D43 AC SER VO MOTOR 1 Y …
2
Maintenance Parts
AUG./2002
SZ-axis
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M2211-00X BELT, SZ 1 Belt for SZ axis A
2 KW3-M2221-00X SPRING 1 1 A
3 KW3-M653A-10X SENSOR, 1-1 ASSY. 1 Origin (EE-SX871R) B
4 KG2-M8582-40X VALVE 2 A040-4E1 (Spare) B
5 KW3-M2259-00X SPG 2 2 A
6 90K55-523784 AC SERVO MOTOR 1 SZ axis B
6
1
5
2
5
1
4
3
3
Maintenance Parts
■
SY-axis:Base
■
SY-axis:Mask Clamp
1
2
1
1
1
2
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin, Limit (EE-SX871R) B
2 90K55-741D43 AC SERVO MOTOR 1 Y axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M2623-A0X SENSOR MASK, ASSY. 2 Mask Check B
2 KGJ-M2619-00X CYLINDER, MASK 4 Mask Clamp B
3 KL0-M655G-30X SENSOR, 1-4 ASSY. 1 Mask Clamp (ZE202A) B
4
Maintenance Parts
■
X/Y-axis
■
R-axis
1
1
3
2
2
1
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-01X SENSOR, 1-1 ASSY. 2 Origine, Limit (EE-SX871R) B
2 90K56-87174Y AC SERVO MOTOR 1 Y axis B
3 90K56-87175X AC SERVO MOTOR 1 X axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin (EE-SX871R) B
2 90K55-521D0R AC SERVO MOTOR 4 R axis B