yvp_xg_mpl_e - 第6页
4 Maintenance Parts ■ X/Y -axis ■ R-axis 1 1 3 2 2 1 No. Part No. Part Name Q'ty Remarks Rank 1 KW3-M653A-01X SENSOR, 1-1 ASSY . 2 Origine, Limit (EE-SX871R) B 2 90K56-87174Y AC SER VO MOTOR 1 Y axis B 3 90K56-87175…
3
Maintenance Parts
■
SY-axis:Base
■
SY-axis:Mask Clamp
1
2
1
1
1
2
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin, Limit (EE-SX871R) B
2 90K55-741D43 AC SERVO MOTOR 1 Y axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M2623-A0X SENSOR MASK, ASSY. 2 Mask Check B
2 KGJ-M2619-00X CYLINDER, MASK 4 Mask Clamp B
3 KL0-M655G-30X SENSOR, 1-4 ASSY. 1 Mask Clamp (ZE202A) B
4
Maintenance Parts
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X/Y-axis
■
R-axis
1
1
3
2
2
1
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-01X SENSOR, 1-1 ASSY. 2 Origine, Limit (EE-SX871R) B
2 90K56-87174Y AC SERVO MOTOR 1 Y axis B
3 90K56-87175X AC SERVO MOTOR 1 X axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin (EE-SX871R) B
2 90K55-521D0R AC SERVO MOTOR 4 R axis B
5
Maintenance Parts
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Z PU Table 1
■
Z PU Table 2
3
4
2
6
1
5
1
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M3242-00X BELT 1 1 A
2 KGJ-M3252-00X BELT 3 2 A
3 KV8-M9213-A0X SPARE FILTER 1 Mask Vacuum A
4 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin (EE-SX871R) B
5 KG2-M8582-40X VALVE 6 A040-4E1 (Spare) B
6 90K55-523D5U AC SERVO MOTOR 1 PU axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M3243-00X BELT 2 1 A
2 KGJ-M3252-00X BELT 3 2 A
3 90K56-743D0Z AC SERVO MOTOR 1 Z axis B