yvp_xg_mpl_e - 第7页
5 Maintenance Parts ■ Z PU T able 1 ■ Z PU T able 2 3 4 2 6 1 5 1 2 3 No. Part No. Part Name Q'ty Remarks Rank 1 KGJ-M3242-00X BEL T 1 1 A 2 KGJ-M3252-00X BEL T 3 2 A 3 KV8-M9213-A0X SP ARE FIL TER 1 Mask V acuum A …
4
Maintenance Parts
■
X/Y-axis
■
R-axis
1
1
3
2
2
1
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-01X SENSOR, 1-1 ASSY. 2 Origine, Limit (EE-SX871R) B
2 90K56-87174Y AC SERVO MOTOR 1 Y axis B
3 90K56-87175X AC SERVO MOTOR 1 X axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin (EE-SX871R) B
2 90K55-521D0R AC SERVO MOTOR 4 R axis B
5
Maintenance Parts
■
Z PU Table 1
■
Z PU Table 2
3
4
2
6
1
5
1
2
3
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M3242-00X BELT 1 1 A
2 KGJ-M3252-00X BELT 3 2 A
3 KV8-M9213-A0X SPARE FILTER 1 Mask Vacuum A
4 KW3-M653A-10X SENSOR, 1-1 ASSY. 2 Origin (EE-SX871R) B
5 KG2-M8582-40X VALVE 6 A040-4E1 (Spare) B
6 90K55-523D5U AC SERVO MOTOR 1 PU axis B
No. Part No. Part Name Q'ty Remarks Rank
1 KGJ-M3243-00X BELT 2 1 A
2 KGJ-M3252-00X BELT 3 2 A
3 90K56-743D0Z AC SERVO MOTOR 1 Z axis B
6
Maintenance Parts
■
SQG Head
3
3
2
2
1
1
4
No. Part No. Part Name Q'ty Remarks Rank
1 KW3-M7104-00X CYLINDER, SQZ 2 CDAS25x25 B
2 KW3-M653B-01X LOAD-CELL ASSY. 2 B
3 KGJ-M7116-01X BALL PLUNGER 4 C
4 KW3-M653C-00X SENSOR, 3-1 ASSY. 4 ZE102A B