FX-3-Rev13(-J)J - 第142页
- - 69. SYSTEM DIAG RAM (SERVO MOTOR) LM G 4 - 2 C 4 - 1 C 4 - 1 C 3 - 2 D 3 - 2 D 4 - 4 C 4 - 4 C 4 - 3 C 3 - 2 D 1 - 4 C 3 - 1 A 2 - 1 B 3 - 2 C 4 - 1 A 4 - 1 A 4 - 2 B 3 - 2 C 3 - 2 C 4 - 4 A 4 - 4 A 4 - 3 A 3 - 2 C…
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REF.NO NOTE PART NO D E S C R I P T I O N Qty
1 400-82363 NFB OUTPUT CABLE ASM 1
2 400-82372 NF FG CABLE ASM 1
3 400-82365 POWER ON LAMP RELAY CABLE ASM 1
4 400-82334 NF OUTPUT CABLE(TB1)ASM 1
5 L800E-821-0A0 POWER ON LAMP 200V CABLE ASM 1
6 400-82364 TB1-L INPUT CABLE(TB1-R) ASM 1
7 400-47864 AC PWR IN UNIT OUTPUT CABLE ASM 1
8 400-47863 AC PWR IN UNIT FG CABLE ASM 1
9 400-47572 AC POWER INPUT UNIT(L) 1
10 400-47883 MAIN SW CABLE ASM 1
11
#01
400-47936 XY DRIVER U INPUT CABLE ASM 1
12
#01
400-82156 TFL 220VOUT CABLE ASM 1
13
#01
400-47964 VACUUM PUMP TERMINAL CABLE ASM 1
14
#01
400-47992 VACUUM PUMP TH-MC CABLE ASM 1
15
#01
400-47965 VACUUM PUMP POWER CABLE ASM 1
16
#01
400-48244 VACUUM PUMP FG CABLE ASM 1
17
#01
400-63490 VACUUM_PUMP 1
18
#01
400-82362 VACUUM I/O CABLE ASM 1
19 400-48062 TRANSFORMER 2
20 400-47859 BU DRV FG CABLE (R) ASM 1
21 400-82163 TF FG CABLE ASM 1
22 400-47961 XY DRV PWR CABLE (L) ASM 1
23 400-82153 TF1 OUTPUT CABLE (100V) ASM 1
24 400-47060 XY_DRIVER_UNIT 2
25
#03
400-47136 XY DRV UNIT (EN) ASM 2
26 400-47963 XY DRV I/O CABLE ASM 2
27 400-47957 XY-RELAY I/O CABLE ASM 2
28
#04
400-47558 XY-RELAY PCB ASM 2
29
#03
400-47860 BU DRV FG CABLE (R) ASM (EN) 1
30 400-48248 XY DRV PWR CABLE (L) ASM (EN) 1
31 400-47885 XY-RELAY PWR CABLE (L) ASM 1
32 400-47079 POWER_SUPPRY_ASSY 2
33
#03
400-47139 POWER SUPPRY ASSY L(EN) 1
34
#03
400-47140 POWER SUPPRY ASSY R(EN) 1
35 400-47754 COVER TOP FAN L RELAY CABLE ASM 1
36 400-65392 COVER TOP FAN XL RELAY CABLE ASM 1
37 400-65391 COVER TOP FAN XL ASM 1
38 400-47758 CONTROL UNIT TOP FAN RELAY CABLE ASM 1
39 400-47702 CTRL UNIT FAN ASM 1
40 400-47760 BASE FAN L RELAY CABLE ASM 1
41 400-65394 BASE FAN SL RELAY CABLE ASM 1
42 400-65393 BASE FAN SL ASM 1
43 400-47764 BASE FAN CL RELAY CABLE ASM 1
44 400-47763 BASE FAN CL ASM 1
45 400-48238 COVER TOP FAN LF/LR RELAY CABL ASM 1
46 400-65396 COVER TOP FAN YL RELAY CABLE ASM 1
47 400-65395 COVER TOP FAN YL CABLE ASM 1
48 400-47956 VACUUM PUMP FAN RELAY CABLE ASM 1
49 400-47757 VACUUM PUMP FAN CABLE ASM 1
50 400-47797 AWC DRV PWR CABLE (L) ASM 1
51
#03
400-47798 AWC DRV PWR CABLE (L) ASM (EN) 1
52 400-47853 AWC DRV FG CABLE (L) ASM 1
53
#03
400-47854 AWC DRV FG CABLE (L) ASM (EN) 1
54 400-47799 BU DRV PWR CABLE (L) ASM 1
55
#03
400-47800 BU DRV PWR CABLE (L) ASM (EN) 1
56 400-47855 BU DRV FG CABLE (L) ASM 1
57
#03
400-47856 BU DRV FG CABLE (L) ASM (EN) 1
58 400-47894 ATX PWR RLY CABLE ASM 1
59 400-47893 ATX PWR CABLE ASM
1
60 400-47892 HOURMETER ASM 1
61 400-47884 AC PWR INPT UNT R-L CABLE ASM 1
62 400-47571 AC POWER INPUT UNIT(R) 1
63 400-47864 AC PWR IN UNIT OUTPUT CABLE ASM 1
64 400-47863 AC PWR IN UNIT FG CABLE ASM 1
65 400-82163 TF FG CABLE ASM 1
66
#02
400-63490 VACUUM_PUMP 1
67
#02
400-47935 TFL 220VOUT CABLE ASM 2
68
#02
400-48244 VACUUM PUMP FG CABLE ASM 1
69
#02
400-47968 VACUUM I/O CABLE ASM 1
70
#02
400-47964 VACUUM PUMP TERMINAL CABLE ASM 1
71
#02
400-47992 VACUUM PUMP TH-MC CABLE ASM 1
72
#02
400-47966 VACUUM PUMP RELAY CABLE ASM 1
73
#02
400-47967 VACUUM PUMP RELAY(S) CABLE ASM 1
74
#02
400-47985 VACUUM PUMP RELAY ON CABLE ASM 1
75
#02
400-47936 XY DRIVER U INPUT CABLE ASM 1
76 400-82155 TFR 220VOUT CABLE ASM 1
77 400-47962 XY DRV PWR CABLE (R) ASM 1
78 400-82154 TF2 OUTPUT CABLE (100V) ASM 1
79 400-47756 COVER TOP FAN R RELAY CABLE ASM 1
80 400-65398 COVER TOP FAN XR RELAY CABLE ASM 1
81 400-65397 COVER TOP FAN XR ASM 1
82 400-47762 BASE FAN R RELAY CABLE ASM 1
83 400-65400 BASE FAN SR RELAY CABLE ASM 1
84 400-65399 BASE FAN SR ASM 1
85 400-47766 BASE FAN CR RELAY CABLE ASM 1
86 400-47765 BASE FAN CR ASM 1
87 400-48239 COVER TOP FAN FR/RR RELAY CABLE ASM 1
88 400-65402 COVER TOP FAN YR RELAY CABLE ASM 1
89 400-65401 COVER TOP FAN YR CABLE ASM 1
90 400-48243 POWER UNIT GND CONECTION CABLE ASM 1
91 400-47701 CPCI POWER CABLE ASM 1
92 400-47703 ATX CTRL CABLE ASM 1
93 400-48245 LNC60 I/F CABLE ASM 1
94 400-47801 AWC DRV PWR CABLE (R) ASM 1
95
#03
400-47802 AWC DRV PWR CABLE (R) ASM (EN) 1
96 400-47857 AWC DRV FG CABLE (R) ASM 1
97
#03
400-47858 AWC DRV FG CABLE (R) ASM (EN) 1
98 400-47803 BU DRV PWR CABLE (R) ASM 1
99
#03
400-47804 BU DRV PWR CABLE (R) ASM (EN) 1
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69.SYSTEM DIAGRAM (SERVO MOTOR)
LM G
4 - 2 C
4 - 1 C4 - 1 C
3 - 2 D
3 - 2 D
4 - 4 C
4 - 4 C4 - 3 C
3 - 2 D
1 - 4 C
3 - 1 A
2 - 1 B
3 - 2 C
4 - 1 A4 - 1 A
4 - 2 B
3 - 2 C
3 - 2 C
4 - 4 A
4 - 4 A
4 - 3 A
3 - 2 C
1 - 4 C
1 - 5 A
3 - 2 B
CN1A CN1B
Z (LR-3)
SERVO AMP
S S C N E T
1 C H
P O S I T I O N
B O A R D ( 1 )
S S C N E T
2 C H
D I
1 C H
D I
2 C H
P O S 1
1 C H
P O S 1
2 C H
X Y
C N 1 0
X Y
C N 1 1
X Y - R E L A Y P C B
C N 1 1
C N 1 0
2 - 1 D
C N 2
C N P 3
C N 1 A C N 1 B
A M P Y L ( L F )
L I N E A R S E R V O
C N 2 L
C N 2
C N P 3
C N 1 BC N 1 A
A M P X ( L F )
L I N E A R S E R V O
C N P 3
C N 2
C N 2 L X - L F
C N 2 4 7
F G - T A P
( L F )
X L F C N 8 1 1
C N 8 1 2
C N 1 7 5 ( X )
C N 1 7 6 ( X )
X
L M G
L M - X
L M G
S C A L E
H E A D
X ( L F )
L I N E A R
S E R V O
M O T O R
X ( L F )
C a b l e B e a r
L I N E A R S E R V O
A M P X ( L R )
C N 1 A
C N 1 B
C N P 3
C N 2
C N 2 L
X
L R C N P 3
X L R
C N 8 1 1
C N 8 1 2
L M X
F G - T A P
( L R )
L R - X
C N 2 L
C N 2 L
L M G
X
C N 1 7 5 ( X ) C N 1 7 6 ( X )
S C A L E
H E A D
X ( L R )
L M G
S E R V O A M P
Z ( L F - 3 )
C N 1 BC N 1 A
L I N E A R
S E R V O
M O T O R
X ( L R )
S E R V O A M P
Z ( L F - 2 )
C N 1 A
C N 1 B
C N 1 B
C N 1 A
Z ( L F - 1 )
S E R V O A M P
C N P 3
C N 2
L I N E A R
S E R V O
M O T O R
Y L ( L F )
C N 8 0 4C N 8 0 3
Y L - L F
L M - Y
C N 1 5 4
L M - G
C N 1 5 1
F G - T A P
( L F )
L I N E A R S E R V O
A M P Y R ( L F )
C N 1 A
C N 1 B
C N P 3
C N 2
C N P 3
C N 2
Y R - L F
C N 8 0 1
F G - T A P
( L F )
C N 1 5 1 C N 1 5 2 L M - G
L M - Y
C N 8 0 2
L I N E A R
S E R V O
M O T O R
Y R ( L F )
L I N E A R S E R V O
A M P Y L ( L R )
C N 1 A
C N 1 B
C N P 3
C N 2
C N P 3
C N 2
Y L - L R
C N 8 0 5
C N 1 5 1
F G - T A P
( L R )
C N 1 5 2
C N 1 5 4
C N 8 0 6 L M - Y
L M - G
L I N E A R
S E R V O
M O T O R
Y L ( L R )
L I N E A R S E R V O
A M P Y R ( L R )
C N 1 A
C N 1 B
C N P 3
C N 2
C a b l e B e a r
C N P 3
C N 2
C N 8 0 7
Y R - L R
F G - T A P
( L R )
C N 1 5 1
C N 1 5 4
L M - G
L M - Y
C N 8 0 8
S E R V O A M P
Z ( L R - 1 )
C N 1 A
C N 1 B
S E R V O A M P
Z ( L R - 2 )
C N 1 A
C N 1 B
L I N E A R
S E R V O
M O T O R
Y R ( L R )
S S C N E T
1 C H
P O S I T I O N
B O A R D ( 2 )
S S C N E T
2 C H
D I
1 C H
D I
2 C H
P O S 2
2 C H
X Y
C N 8
C N 1 3
X Y
P O S 2
1 C H
X Y - R E L A Y P C B
C N 1 3
C N 8
C N 2
C N P 3
C N 1 BC N 1 A
A M P Y L ( R F )
L I N E A R S E R V O
C N 2 L
C N 2
C N P 3
C N 1 B
C N 1 A
A M P X ( R F )
L I N E A R S E R V O
C N P 3
C N 2
C N 2 L
C N 1 7 5 ( X )
C N 1 7 6 ( X )
X - R F
X
L M GC N 2 4 7
F G - T A P
( R F )
L M - X
C N 8 1 2
C N 8 1 1
X R F
S C A L E
H E A D
X ( R F )
L M G
L I N E A R
S E R V O
M O T O R
X ( R F )
L I N E A R S E R V O
A M P X ( R R )
C N 1 A
C N 1 B
C N P 3
C N 2
C N 2 L
C a b l e B e a r
X
R R C N P 3
X R R
C N 8 1 1
C N 8 1 2
L M X
L M G
F G - T A P
( R R )
C N 2 4 7
R R - X
C N 2 L
C N 2 L
X - R R
X
C N 1 7 6 ( X )
C N 1 7 5 ( X )
S C A L E
H E A D
X ( R R )
L I N E A R
S E R V O
M O T O R
X ( R R )
S E R V O A M P
Z ( R F - 1 )
S E R V O A M P
Z ( R F - 2 )
S E R V O A M P
Z ( R F - 3 )
C N 1 A
C N 1 B
C N 1 A
C N 1 B
C N 1 A
C N 1 B
L I N E A R
S E R V O
M O T O R
Y L ( R F )
C N 8 0 6
L M - Y
L M - G
C N 1 5 2
C N 1 5 1
F G - T A P
( R F )
C N 8 0 5
Y L - R F
C N P 3
C N 2
L I N E A R S E R V O
A M P Y R ( R F )
C N 1 A
C N 1 B
C N P 3
C N 2
C N P 3
C N 2
Y R - R F
C N 8 0 7
C N 8 0 8
L M - Y
C N 1 5 4
F G - T A P
( R F )
C N 1 5 1
L I N E A R S E R V O
A M P Y L ( R R )
C N 1 A
C N 1 B
C N P 3
C N 2
C N P 3
C N 2
Y L - R R
C N 8 0 3
C N 8 0 4
L M - Y
C N 1 5 4
L M - G
F G - T A P
( R R )
C N 1 5 1
L I N E A R
S E R V O
M O T O R
Y L ( R R )
L I N E A R S E R V O
A M P Y R ( R R )
C N 1 A
C N 1 B
C N P 3
C N 2
C a b l e B e a r
C N P 3
C N 2
Y R - R R
C N 8 0 1
F G - T A P
C N 1 5 1
( R R )
C N 1 5 2 L M - G
L M - Y
C N 8 0 2
S E R V O A M P
Z ( R R - 1 )
C N 1 A
C N 1 B
L I N E A R
S E R V O
M O T O R
Y R ( R R )
S E R V O A M P
Z ( R R - 2 )
C N 1 A C N 1 B
S E R V O A M P
Z ( R R - 3 )
C N 1 A
C N 1 B
1
1
2 2 2 23 4 5 6
9
9
4 3
3 5
3 6
1 6
3 3
4 2
1 7
1 5
2 3
1 1
1 1
3 9
4 0
4 1
2 2
3 5
7
8
1 9
2 2
2 1
2 0
1 1
2 3
1 5
1 7
1 8
8
1 9
2 6
2 4
2 5
1 1
1 6
7
1 4
1 4
1 4
1 1
1 1
1 1
1 1
1 4
1 4
1 4
8
1 4
1 1
1 1
1 4
1 4
8
1 4
1 4
1 4
1 1
1 1
1 1
1 1
8
7
1 1
1 2
2 7
2 8
2 3
1 7
2 9
3 0
2 2
X - L R
C N 2 4 7
1 5
8
3 4
3 5
3 6
1 6
3 3
3 4
1 6
3 7
3 5
3 4
1 2
3 8
3 3
2 6
1 9
3 2
2 5
3 1
1 1
1 6
1 5
4 5
1 3
1 9
2 3
1 7
4 6
4 7
2 2
4 4
3 7
3 3
3 5
4 3
1 6
8
L I N E A R
S E R V O
M O T O R
Y R ( R F )
L M - G
1 6
4 9
1 9
2 5
3 7
4 8
2 5
4 9
1 9
1 2
3 2
1 6
1 0
3 7
8
7
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REF.NO NOTE PART NO D E S C R I P T I O N Qty
1 400-44540 16AXIS 2CH SERVO CONTROLLER 2
2 400-48069 OPTICAL FIBER CABLE 1.2M 4
3 400-47930 POS BOARD1 1CH CABLE ASM 1
4 400-47931 POS BOARD1 2CH CABLE ASM 1
5 400-47932 POS BOARD2 1CH CABLE ASM 1
6 400-47933 POS BOARD2 2CH CABLE ASM 1
7 400-48019 SERVO AMP 2KW 4
8 400-48020 SERVO AMP 3.5KW 8
9
#01
400-47558 XY-RELAY PCB ASM 2
10 400-47728 YR RR MTR CABLE ASM 1
11 400-44541 OPTICAL FIBER CABLE 0.15M 16
12 400-48070 OPTICAL FIBER CABLE 7M 3
13 400-48071 OPTICAL FIBER CABLE 8M 1
14 400-44535 4AXIS SERVO AMP 12
15 400-47983 X LINEAR MOTOR ASM 4
16 400-47984 Y LINEAR MOTOR ASM 8
17 400-44531 MAGNETIC SCALE X SENSOR UNIT 4
18 400-47717 X LF MTR CABLE ASM 1
19 400-47810 Y BEAR A CABLES ASM 6
20 400-48267 X-LF THERMISTOR CABLE ASM 1
21 400-47705 X LF LINEAR SENSOR CABLE ASM 1
22 400-47500 XY BEAR CABLES D ASM 4
23 400-65181 X THERMISTOR RELAY CABLE ASM 4
24 400-47721 YL LF MTR CABLE ASM 1
25 400-47813 Y LINER BEAR A CABLES ASM 4
26 400-47988 Y-LF THERMISTOR CABLE ASM 2
27 400-47718 X LR MTR CABLE ASM 1
28 400-47811 Y BEAR B CABLES ASM 1
29 400-48268 X-LR THERMISTOR CABLE ASM 1
30 400-47706 X LR LINEAR SENSOR CABLE ASM 1
31 400-47725 YR LF MTR CABLE ASM 1
32 400-48242 X PLUS LIMIT RELAY CABLE ASM 2
33 400-47814 Y LINER BEAR B CABLES ASM 4
34 400-47989 Y-LR THERMISTOR CABLE ASM 2
35 400-47811 Y BEAR B CABLES ASM 5
36 400-47881 X POS LIMIT RELAY CABLE ASM 2
37 400-65200 RF(YR) THERMISTOR RELAY CABLE ASM 4
38 400-47726 YR LR MTR CABLE ASM 1
39 400-47719 X RF MTR CABLE ASM 1
40 400-48269 X-RF THERMISTOR CABLE ASM 1
41 400-47707 X RF LINEAR SENSOR CABLE ASM 1
42 400-47723 YL RF MTR CABLE ASM 1
43 400-47990 Y-RF THERMISTOR CABLE ASM 2
44 400-47727 YR RF MTR CABLE ASM 1
45 400-47720 X RR MTR CABLE ASM 1
46 400-48270 X-RR THERMISTOR CABLE ASM 1
47 400-47708 X RR LINEAR SENSOR CABLE ASM 1
48 400-47724 YL RR MTR CABLE ASM 1
49 400-47991 Y-RR THERMISTOR CABLE ASM 2