P-310-004(2_2)e - 第17页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 201 0919I00K TUBE D4 1 2091908207-001 Fig. I1 1007-001 Fig. I1-3 SIGMA-G5SA SIGMA-G5SB SIGMA-G5SC SIGMA-G5SD UNIT -8 Fig. I1 ST OCKER
Fig. I1-3
エア配管
Air Piping
1007-001
From Main Body
Stocker Up/Down
201
See Fig. I1-2
Key No.121
See Fig. I1-2
Key No.125
Y0937
B0920
B0918
B0922
Fig. I1
中異形ノズルストッカ部
MIDDLE SIZE ODD-SHAPED NOZZLE SECTION
UNIT-8
Fig. I1
STOCKER
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
201 0919I00K TUBE D4 1 2091908207-001
Fig. I1
1007-001
Fig. I1-3
SIGMA-G5SA
SIGMA-G5SB
SIGMA-G5SC
SIGMA-G5SD
UNIT-8
Fig. I1
STOCKER
MEMO