m330_01_gas_cabinet气柜 - 第20页
GAS SYSTEM Low pressure • Ramped Poly • Flat Poly • Nitride • TEOS • LTO • Ta 2 O 5 Because of the flexibility of the Tempress System s Inc. systems variations on these processes are available as well, such as doped or l…
GAS SYSTEM
2.2 Electronics
Interconnection Boards
The digital and analog interconnection boards for the gassystem are used as an
interconnection between the DPC, the safety boards and the gaspanel. The safety boards
allow the opening of valves for specific (dangerous) gases only if all safe conditions are
satisfied.
For a complete description of the interconnection and safety boards, see the DPC Reference
manual.
DPC
The Digital Process Controller together with the Digital Temperature Controller (DTC)
forms the heart of the system control. For detailed information refer to the DPC reference
manual (M410.00)
Safety board
A safety board is used to check the safety conditions when using hydrogen and oxygen in a
Tempress external torch. It is used as a hardware protection. This safety board works only in
combination with the Tempress DPC control system. It is not used in this configuration as a
“stand-alone” unit.
Pressure interface board
A pressure interface board is used in Low Pressure Chemical Vapour Deposition (LPCVD)
gassystems as safety component for the right gaspressure. The process gaspressure will be
compared with a safety setpoint of default 1.4 Torr. Specific valves can only be opened if the
process pressure is below this safety setpoint.
High/Low limit board
A high/low limit board is used as a safety component to prevent specific valves to be opened
if a required gasflow is out of range.
2.3 Processes
A variety of guaranteed processes are available on the Tempress Diffusion systems, including:
Atmospheric
• Anneal
• Dry Oxidation (with or without TransLC cleaning)
• Wet Oxidation (with or without TransLC cleaning)
• POCl
3
GAS CABINET REFERENCE MANUAL
2-14
GAS SYSTEM
Low pressure
• Ramped Poly
• Flat Poly
• Nitride
• TEOS
• LTO
• Ta
2
O
5
Because of the flexibility of the Tempress Systems Inc. systems variations on these processes
are available as well, such as doped or low stress versions.
GAS CABINET REFERENCE MANUAL
2-15
INSTALLATION
3.Installation
3.1 Unpacking
• Inspect the packing materials before unpacking the gas cabinet and all its accessories.
If there is any visible damage caused by the transport, the carrier must be contacted to
inspect the damage before unpacking.
• If there is any visible damage Tempress Systems Inc. must be informed within 24
hours;
• Unpack the boxes one by one;
• Release and remove equipment wrappings. 2 layers of sheets are covering the gas
cabinet and its accessories. The first layer must be removed outside the cleanroom,
the second layer must be removed inside the cleanroom.
• Check the contents of the boxes with the collo contents list;
• Depending on the type of packing materials is being used; a final de-dusting must be
done before it is put into position. Although the system has been cleaned before
shipping the additional cleaning is highly recommended.
• Lift or pull the wrappings away from all stainless steel surfaces. Do not drag packing
materials across the equipment surfaces as this may cause damage to its surface.
• A forklift with a minimum capacity of 1500 kg has to be available to move the gas
cabinet its final position.
GAS CABINET REFERENCE MANUAL
3-1