m330_01_gas_cabinet气柜 - 第22页

INSTALLATION 3.2 Inspection Check for any parts that may have loos ened or become free during tr ansit (especially the electrical connections) and c heck all components for damage. 3.3 The gas cabinet • Move or replace t…

INSTALLATION

3.Installation

3.1 Unpacking

• Inspect the packing materials before unpacking the gas cabinet and all its accessories.

If there is any visible damage caused by the transport, the carrier must be contacted to

inspect the damage before unpacking.

• If there is any visible damage Tempress Systems Inc. must be informed within 24

hours;

• Unpack the boxes one by one;

• Release and remove equipment wrappings. 2 layers of sheets are covering the gas

cabinet and its accessories. The first layer must be removed outside the cleanroom,

the second layer must be removed inside the cleanroom.

• Check the contents of the boxes with the collo contents list;

• Depending on the type of packing materials is being used; a final de-dusting must be

done before it is put into position. Although the system has been cleaned before

shipping the additional cleaning is highly recommended.

• Lift or pull the wrappings away from all stainless steel surfaces. Do not drag packing

materials across the equipment surfaces as this may cause damage to its surface.

• A forklift with a minimum capacity of 1500 kg has to be available to move the gas

cabinet its final position.

GAS CABINET REFERENCE MANUAL

3-1

INSTALLATION

3.2 Inspection

Check for any parts that may have loosened or become free during transit (especially the

electrical connections) and check all components for damage.

3.3 The gas cabinet

• Move or replace the gas cabinet to its final position.

• Align the gas cabinet with respect to the furnace.

• Place a spirit level on top of the gas cabinet. The gas cabinet can be levelled by

the adjustable feet.

• Install all facilities as defined on the outline drawing and verify that they comply

with the labelling.

• Do not turn on any of the services connected without the presence of a

qualified engineer from Tempress, unless written permission is gained from

Tempress.

• The Tempress-engineer will check final alignments and facility functionality.

• Install the exhaust, with a flowrate as defined on the outline drawing.

• The customer should install all external connections of the gaslines, compressed

air and cooling water to the bulkheads.

• All gaslines should be helium leak checked by the customer prior to operation

(10

-8

cc/min)

• A qualified Tempress engineer will do all internal connections.

• Install the socket-joint and clamp it on the ball-joint of the tube. Make sure the

installation of the furnace has been finished and the tube is placed.

GAS CABINET REFERENCE MANUAL

3-2

START UP

4.Start Up

4.1 Introduction

After the gas cabinet is installed and connected correctly, start-up can begin.

Valve operation and gasflows (including pressure control for LPCVD) will be controlled by

the DPC.

In case of emergency or system failure, all system power can be switched off by the EMO-

switch, forcing all NC valves to be closed and gaslines to be shut off. See the outline drawing

for the exact locations of the EMO-switch on the gascabinet.

4.2 Prerequisites

First the furnace, loadstation, gascabinet and powercabinet installation must have been

completed.

Second, the start-up procedure of the furnace as described in the “Diffusion Furnace”

manual, chapter 5.0 (Start-Up) must be completed.

4.3 Gas Cabinet start up

For each gasline:

• Check connections

• Make sure gaslines are connected to the processtube

• Make sure the tube is sealed properly (boat in)

• Close door

• Close MFC’s

• Close valves

• Close handvalves

• Close regulators

• Close facility gas supply

• Close gas bottle (depending on customers facilities)

Atmospheric

• Open facility gassupply

• Set regulator to 30 psi N

and

20 – 25 psi H

, O

• Open handvalves on all tube

levels

• Close facility gas supply

LPCVD

• Start the pump

• Evacuate the tube

• Open process valve (manifold)

• Pump until base pressure is

reached

• Maximize MFC setpoint

GAS CABINET REFERENCE MANUAL

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