m330_01_gas_cabinet气柜 - 第23页
START UP 4.S t art Up 4.1 Introduction After the gas cabine t is installed and connected correc tly, start-up can begi n. Valve operation and gasflows (including pressu re control for LP CVD) will be controlled by the DP…
INSTALLATION
3.2 Inspection
Check for any parts that may have loosened or become free during transit (especially the
electrical connections) and check all components for damage.
3.3 The gas cabinet
• Move or replace the gas cabinet to its final position.
• Align the gas cabinet with respect to the furnace.
• Place a spirit level on top of the gas cabinet. The gas cabinet can be levelled by
the adjustable feet.
• Install all facilities as defined on the outline drawing and verify that they comply
with the labelling.
• Do not turn on any of the services connected without the presence of a
qualified engineer from Tempress, unless written permission is gained from
Tempress.
• The Tempress-engineer will check final alignments and facility functionality.
• Install the exhaust, with a flowrate as defined on the outline drawing.
• The customer should install all external connections of the gaslines, compressed
air and cooling water to the bulkheads.
• All gaslines should be helium leak checked by the customer prior to operation
(10
-8
cc/min)
• A qualified Tempress engineer will do all internal connections.
• Install the socket-joint and clamp it on the ball-joint of the tube. Make sure the
installation of the furnace has been finished and the tube is placed.
GAS CABINET REFERENCE MANUAL
3-2
START UP
4.Start Up
4.1 Introduction
After the gas cabinet is installed and connected correctly, start-up can begin.
Valve operation and gasflows (including pressure control for LPCVD) will be controlled by
the DPC.
In case of emergency or system failure, all system power can be switched off by the EMO-
switch, forcing all NC valves to be closed and gaslines to be shut off. See the outline drawing
for the exact locations of the EMO-switch on the gascabinet.
4.2 Prerequisites
First the furnace, loadstation, gascabinet and powercabinet installation must have been
completed.
Second, the start-up procedure of the furnace as described in the “Diffusion Furnace”
manual, chapter 5.0 (Start-Up) must be completed.
4.3 Gas Cabinet start up
For each gasline:
• Check connections
• Make sure gaslines are connected to the processtube
• Make sure the tube is sealed properly (boat in)
• Close door
• Close MFC’s
• Close valves
• Close handvalves
• Close regulators
• Close facility gas supply
• Close gas bottle (depending on customers facilities)
Atmospheric
• Open facility gassupply
• Set regulator to 30 psi N
2
and
20 – 25 psi H
2
, O
2
• Open handvalves on all tube
levels
• Close facility gas supply
LPCVD
• Start the pump
• Evacuate the tube
• Open process valve (manifold)
• Pump until base pressure is
reached
• Maximize MFC setpoint
GAS CABINET REFERENCE MANUAL
4-1
START UP
GAS CABINET REFERENCE MANUAL
4-2
• Mark pressure reading
• Leave gassystem pressurized for
at least 12 hours
• Mark pressure reading. Any drop
in pressure indicates a gas leak.
• Use suitable gasleak detector
(such as Snoopy or electronic) to
trace any leak
• When no pressure drop is
detected open the facility gas
supply.
• The gassystem is ready for use.
• Pump until base pressure
• Open handvalve
• Pump until base pressure
• Open regulator fully
• Pump until base pressure
• Open facility gas supply slowly
• Pump until base pressure
• Leakcheak max 20 mtor/min right
up to the bottle
• Open N
2
purge at gas bottle
cabinet briefly. Pressure should
not exceed the safety setpoint of
1.4 torr measured at the tube.
• Pump until base pressure
• Repeat N
2
purge/ Pump cycle 20
times.
• Leakcheck max. 20 mtor/min
• Close facility gas supply
• Close regulator
• Close handvalve
• Close MFC
• Close process valve
• Slowly open the gas bottle
• Slowly open facility gas supply
• Slowly open the regulator
• Set pressure at 20 psi. If gaslines
are shared with other tubes use 30
psi for N
2
and 20-25 psi for O
2
• Slowly open the handvalve at all
applicable tube levels
• Close facility gas supply
• Mark pressure reading
• Leave gassystem pressurized for at
least 12 hours
• Mark pressure reading. Any drop
in pressure indicates a gasleak.
• Use suitable gas leak detector
(such as Snoopy or electronic) to
trace any leak
• When no pressure drop is
detected open the facility gas
supply.
• The gassystem is ready for use.