m330_01_gas_cabinet气柜 - 第24页

START UP G AS CABINET R EFERENCE M ANUAL 4-2 • Mark pressure reading • Leave gassystem pressurized for at least 12 hours • Mark pressure reading. Any drop in pressure indicates a gas leak. • Use suitable gasleak detector…

START UP

4.Start Up

4.1 Introduction

After the gas cabinet is installed and connected correctly, start-up can begin.

Valve operation and gasflows (including pressure control for LPCVD) will be controlled by

the DPC.

In case of emergency or system failure, all system power can be switched off by the EMO-

switch, forcing all NC valves to be closed and gaslines to be shut off. See the outline drawing

for the exact locations of the EMO-switch on the gascabinet.

4.2 Prerequisites

First the furnace, loadstation, gascabinet and powercabinet installation must have been

completed.

Second, the start-up procedure of the furnace as described in the “Diffusion Furnace”

manual, chapter 5.0 (Start-Up) must be completed.

4.3 Gas Cabinet start up

For each gasline:

• Check connections

• Make sure gaslines are connected to the processtube

• Make sure the tube is sealed properly (boat in)

• Close door

• Close MFC’s

• Close valves

• Close handvalves

• Close regulators

• Close facility gas supply

• Close gas bottle (depending on customers facilities)

Atmospheric

• Open facility gassupply

• Set regulator to 30 psi N

and

20 – 25 psi H

, O

• Open handvalves on all tube

levels

• Close facility gas supply

LPCVD

• Start the pump

• Evacuate the tube

• Open process valve (manifold)

• Pump until base pressure is

reached

• Maximize MFC setpoint

GAS CABINET REFERENCE MANUAL

4-1

START UP

GAS CABINET REFERENCE MANUAL

4-2

• Mark pressure reading

• Leave gassystem pressurized for

at least 12 hours

• Mark pressure reading. Any drop

in pressure indicates a gas leak.

• Use suitable gasleak detector

(such as Snoopy or electronic) to

trace any leak

• When no pressure drop is

detected open the facility gas

supply.

• The gassystem is ready for use.

• Pump until base pressure

• Open handvalve

• Pump until base pressure

• Open regulator fully

• Pump until base pressure

• Open facility gas supply slowly

• Pump until base pressure

• Leakcheak max 20 mtor/min right

up to the bottle

• Open N

purge at gas bottle

cabinet briefly. Pressure should

not exceed the safety setpoint of

1.4 torr measured at the tube.

• Pump until base pressure

• Repeat N

purge/ Pump cycle 20

times.

• Leakcheck max. 20 mtor/min

• Close facility gas supply

• Close regulator

• Close handvalve

• Close MFC

• Close process valve

• Slowly open the gas bottle

• Slowly open facility gas supply

• Slowly open the regulator

• Set pressure at 20 psi. If gaslines

are shared with other tubes use 30

psi for N

and 20-25 psi for O

• Slowly open the handvalve at all

applicable tube levels

• Close facility gas supply

• Mark pressure reading

• Leave gassystem pressurized for at

least 12 hours

• Mark pressure reading. Any drop

in pressure indicates a gasleak.

• Use suitable gas leak detector

(such as Snoopy or electronic) to

trace any leak

• When no pressure drop is

detected open the facility gas

supply.

• The gassystem is ready for use.

MAINTENANCE

GAS CABINET REFERENCE MANUAL

5-1

5.Maintenance

5.1 Introduction

Maintenance for the gascabinet and its components is limited due to the use of high quality

components and high purity elements.

Routine checks include pressure gauge readings every day and inline filter replacement every

year.

5.2 Leak-checks

Whenever a component in the gasline (either the preplumbing or gaspanel) is replaced a full

leakcheck is required.

Two different kinds of leak-checks are possible. There are a helium- and a pressure leak-

check.

5.2.1

Helium Leak check

A Helium leak check is used to test the integrity of the components or complete gasline.

• Connect the leaktester on a gas-inlet;

• Open the pressure regulator fully to maximum;

• Open the handvalve at tube level;

• Open the MFC (this must be done by the DPC, for more information, look at the

manual of the DPC);

• Open all valves in the gassystem (this must also be done by the DPC);

• Leak check may now begin;

• If no leak is found, repeat steps, mentioned above, in reversed and opposed

order. However, if a leak has been found, tighten/repair the relating nut/coupling

(etc.).

NOTE

Leak must be below 1 * 10

-8

atm. cm

/sec.

NOTE

If a checkvalve is present then a leak-check must be done

at both sides of this valve.