m330_01_gas_cabinet气柜 - 第30页

MAINTENANCE

GAS CABINET REFERENCE MANUAL

5-5

5.6 Preventive maintenance processes

Daily maintenance:

Check system for any alarms during process and/or standby.

Check system and/or logging for base pressure value. (This will indicate that

with any major rise the vacuum pump and/or line can have problems)

Check the vacuum atmosphere switch, adjust to atmospheric pressure. LED

should light up.

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Weekly maintenance:

Check the pump status.

If applicable, check TEOS system bubbler temperature.

Check the tightness of the vacuumline connections

• Front flange screws.

• Ball joint clamp.

Check the waterflow on the flanges and the heatexchanger.

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MAINTENANCE

GAS CABINET REFERENCE MANUAL

5-6

Monthly maintenance:

Replace the O-ring on the Loaddoor.

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Yearly maintenance:

Clean complete vacuum lines of the system.

Full check on the vacuum pumps.

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TROUBLE SHOOTING

6.Trouble shooting

PROBLEM: POSSIBLE CAUSE:

SOLUTION

1. Pressure is low after

the gassystem.

• Check regulator setting; check

if the gas supply valves are

open.

• Filters are clogged.

• The gas cylinder is empty

• MFC is out of order

Replace filter

Replace gas cylinder

Replace MFC

2. No flow.

• Valve is closed

• Regulator is out of order

• MFC is out of order

Replace valve

Check safety condition and

replace regulator

Replace MFC

In most cases (especially at N

2

and Airflow) the pressure will be checked by the pressure-

switches. If a failure appears, the DPC will give an alarm. For more information, look at the

manual of the DPC.

If a gasflow reduces and a high-low limit is set, an alarm is activated by the DPC.

GAS CABINET REFERENCE MANUAL

6-1