m330_01_gas_cabinet气柜 - 第7页
GAS SYSTEM Digital pressure switch • Bubbler systems • External torches • Coldtrap • Vacuum pumps system • Interconnectio n Board • DPC G AS CABINET R EFERENCE M ANUAL 2-2
GAS SYSTEM
2. Gas System
The gassystem is defined as the complete gas supply. It includes preplumbing, gaspanels and
electronic components. The gassystems provide the desired flows of (a mixture of) gasses
required for the different kind of processes. Each process has its own gassystem.
The gas cabinet of a furnace can contain any of the following components, which will be
described in the following sections.
• Pressure Gauges
• Pressure Regulators
• Gaspanels
Manual shut-off valve
Pneumatic valve
Fine metering valve
Check valve
Mass Flow Controllers
Mini and Micro Inline Gas Filters
Flowmeters
GAS CABINET REFERENCE MANUAL
2-1
GAS SYSTEM
GAS CABINET REFERENCE MANUAL
2.1 Gassystem parts
Pressure Gauges
The pressure gauge is used for readout of the process gas pressure before the gas is
distributed to the gaspanels. It is designed with safety features to minimize injury to
personnel and damage to property in the event of a gauge failure. The gauges are mounted
above the gassystems at the front of the gascabinet.
Pressure Gauge
Pressure Regulator
Figure 2-1 Source gas pressure adjustment
Pressure Regulators
Each process gas has its own regulator to reduce the gassource pressure and adjust the
correct pressure to the gassystem. The pressure regulators are part of the pre-plumbing and
are located above the gaspanels, see Figure 2-1.
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