DECAN_S1_Maintenance_EN.pdf - 第46页
DE CAN S 1 Mai nte nan ce H an dbo ok 3-1 7 chapt er 3 Daily Inspe ction Nex t Generation, Multi- Funct ional Placer Checking and Cleaning and Fix Camera Lens Step 4 . Clea n the le ns us ing an air s pray Caution The co…
DECAN S1 Maintenance Handbook
3-16
chapter 3
Daily Inspection
Next Generation, Multi-Functional Placer
Checking and Cleaning and Fix Camera Lens
Daily Inspection
Remove foreign material on the camera lens to prevent part recognition error.
Tool for Maintenance
Ultra fine fiber cloth, alcohol, Wrench
Measures
Step 1.
Move the X-frame to the rear.
For more details, refer to "Backward movement of the X-frame" on
page 1-4
Step 2.
Press the 'STOP' and 'RESET' buttons in order after
pressing the 'EMG' button on the OP panel to stop
operation.
For more details, refer to "How to perform emergency stop" on page
1-2.
Step 3.
Separate cover glass
Checking and Cleaning and Fix Camera Lens
(Time required: 10min / No. D-7)
DECAN S1 Maintenance Handbook
3-17
chapter 3
Daily Inspection
Next Generation, Multi-Functional Placer
Checking and Cleaning and Fix Camera Lens
Step 4.
Clean the lens using an air spray
Caution
The cover glass is fragile. Take care.
MEMO
Next Generation, Multi-Functional Placer
DECAN S1 Maintenance Handbook
3-18
Daily Inspection