JM-10-Rev03 - 第5页
42. SYSTEM DIAGRAM (POWER-UNIT EN 2/2) ....... .................. ............ .............. .............. .............. ......... ........... .............. . 83 SYSTEM DIAGRAM(POWER − UNIT EN 2/2) 43. SYSTEM DIAGRAM…
20. HEAD RELATED COMPONENTS...................................................................................................................................39
ヘッド周り関係
21. OCC COMPONENTS.......................................................................................................................................................41
OCC 関係
22. PWB CONVEYOR COMPONENTS (1) ...........................................................................................................................43
基板搬送関係(1)
23. PWB CONVEYOR COMPONENTS (2) ...........................................................................................................................45
基板搬送関係(2)
24. VACCUM PUMP UNIT..................................................................................................................................................... 47
真空ポンプユニット
25. SUPPORT TABLE & MTS CONNECT UNIT COMPONENTS(AFTER M/C REV.E) .......................................................49
サポートテーブル・MTS 接続ユニット関係(マシン REV.E 以降)
26. ACCESSORIES PARTS COMPONENTS........................................................................................................................51
梱包添付品関係
27. ACCESSARY COMPONENTS (OP NO LCJ ASSEMBLY)..............................................................................................53
添付品関係(OP リード矯正冶具組 無し時)
OPTION
オプション
28. VCS COMPONENTS .......................................................................................................................................................55
VCS 関係
29. HMS, SIGNAL LIGHT & MTS ATTACHMENT UNIT........................................................................................................57
HMS・シグナルライト・MTS 取付ユニット関係
30. CONVEYOR EXTENTION GUIDE & AUXILIARY MEMORY COMPONENTS................................................................59
搬送延長ガイド・補助記憶装置関係
31. MAIN LINE FILTER COMPONENTS ...............................................................................................................................61
メインラインフィルタ関係
32. TAPE REEL INSTALLING BASE, HANDLE ARM & EXTEND TUBE COMPONENTS ...................................................63
テープリール取付台・ハンドルアーム・延長チューブ関係
33. LEAD CORRECT JIG BASE COMPONENTS .................................................................................................................65
リード矯正冶具ベース関係
34. SYSTEM DIAGRAM (1) ...................................................................................................................................................67
SYSTEM DIAGRAM(1)
35. SYSTEM DIAGRAM (2) ...................................................................................................................................................69
SYSTEM DIAGRAM(2)
36. SYSTEM DIAGRAM (3) ...................................................................................................................................................71
SYSTEM DIAGRAM(3)
37. SYSTEM DIAGRAM (4) ...................................................................................................................................................73
SYSTEM DIAGRAM(4)
38. SYSTEM DIAGRAM (5) ...................................................................................................................................................75
SYSTEM DIAGRAM(5)
39. SYSTEM DIAGRAM (POWER-UNIT ST 1/2)...................................................................................................................77
SYSTEM DIAGRAM(POWER − UNIT ST 1/2)
40. SYSTEM DIAGRAM (POWER-UNIT ST 2/2)...................................................................................................................79
SYSTEM DIAGRAM(POWER − UNIT ST 2/2)
41. SYSTEM DIAGRAM (POWER-UNIT EN 1/2) .................................................................................................................. 81
SYSTEM DIAGRAM(POWER − UNIT EN 1/2)
42. SYSTEM DIAGRAM (POWER-UNIT EN 2/2) ..................................................................................................................83
SYSTEM DIAGRAM(POWER − UNIT EN 2/2)
43. SYSTEM DIAGRAM (SAFETY-UNIT EN)........................................................................................................................85
SYSTEM DIAGRAM(SAFETY − UNIT EN)

- 1 -
MAIN UNIT
本体
1. BASE FRAME COMPONENTS
ベースフレーム関係
8
6
4
5
51
3
7
17
2
9
8
1
50
23
30
31
32
32
39
38
40
54
53
55
24
41 4 8
46
47
35
36
37
36
37
39
35
37
37
36
37
39
35
37
19 20
45
42
43
44
29
29
29
28
28
28
10
13
14
18
57
1
5
16
12
11
18
22
21
25
25
25
25
49
27
49
27
21
34
27
52
52
52
52
52
52
52
52
33
3
4
2
7
56
18
26
58
58
26
16
26
58
26
58