JM-10-Rev03 - 第5页

42. SYSTEM DIAGRAM (POWER-UNIT EN 2/2) ....... .................. ............ .............. .............. .............. ......... ........... .............. . 83 SYSTEM DIAGRAM(POWER − UNIT EN 2/2) 43. SYSTEM DIAGRAM…

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20. HEAD RELATED COMPONENTS...................................................................................................................................39
ヘッド周り関係
21. OCC COMPONENTS.......................................................................................................................................................41
OCC 関係
22. PWB CONVEYOR COMPONENTS (1) ...........................................................................................................................43
基板搬送関係(1)
23. PWB CONVEYOR COMPONENTS (2) ...........................................................................................................................45
基板搬送関係(2)
24. VACCUM PUMP UNIT..................................................................................................................................................... 47
真空ポンプユニット
25. SUPPORT TABLE & MTS CONNECT UNIT COMPONENTS(AFTER M/C REV.E) .......................................................49
サポートテーブル・MTS 接続ユニット関係(マシン REV.E 以降)
26. ACCESSORIES PARTS COMPONENTS........................................................................................................................51
梱包添付品関係
27. ACCESSARY COMPONENTS (OP NO LCJ ASSEMBLY)..............................................................................................53
添付品関係(OP リード矯正冶具組 無し時)
OPTION
オプション
28. VCS COMPONENTS .......................................................................................................................................................55
VCS 関係
29. HMS, SIGNAL LIGHT & MTS ATTACHMENT UNIT........................................................................................................57
HMS・シグナルライト・MTS 取付ユニット関係
30. CONVEYOR EXTENTION GUIDE & AUXILIARY MEMORY COMPONENTS................................................................59
搬送延長ガイド・補助記憶装置関係
31. MAIN LINE FILTER COMPONENTS ...............................................................................................................................61
メインラインフィルタ関係
32. TAPE REEL INSTALLING BASE, HANDLE ARM & EXTEND TUBE COMPONENTS ...................................................63
テープリール取付台・ハンドルアーム・延長チューブ関係
33. LEAD CORRECT JIG BASE COMPONENTS .................................................................................................................65
リード矯正冶具ベース関係
34. SYSTEM DIAGRAM (1) ...................................................................................................................................................67
SYSTEM DIAGRAM(1)
35. SYSTEM DIAGRAM (2) ...................................................................................................................................................69
SYSTEM DIAGRAM(2)
36. SYSTEM DIAGRAM (3) ...................................................................................................................................................71
SYSTEM DIAGRAM(3)
37. SYSTEM DIAGRAM (4) ...................................................................................................................................................73
SYSTEM DIAGRAM(4)
38. SYSTEM DIAGRAM (5) ...................................................................................................................................................75
SYSTEM DIAGRAM(5)
39. SYSTEM DIAGRAM (POWER-UNIT ST 1/2)...................................................................................................................77
SYSTEM DIAGRAM(POWER UNIT ST 1/2)
40. SYSTEM DIAGRAM (POWER-UNIT ST 2/2)...................................................................................................................79
SYSTEM DIAGRAM(POWER UNIT ST 2/2)
41. SYSTEM DIAGRAM (POWER-UNIT EN 1/2) .................................................................................................................. 81
SYSTEM DIAGRAM(POWER UNIT EN 1/2)
42. SYSTEM DIAGRAM (POWER-UNIT EN 2/2) ..................................................................................................................83
SYSTEM DIAGRAM(POWER UNIT EN 2/2)
43. SYSTEM DIAGRAM (SAFETY-UNIT EN)........................................................................................................................85
SYSTEM DIAGRAM(SAFETY UNIT EN)
- 1 -
MAIN UNIT
本体
1. BASE FRAME COMPONENTS
ベースフレーム関係
51
17
50
23
30
31
32
32
39
38
40
54
53
55
24
41
46
47
35
36
37
36
37
39
35
37
37
36
37
39
35
37
19
45
42
43
44
29
29
29
28
28
28
10
13
14
18
57
16
12
11
18
22
21
25
25
25
25
49
27
49
27
21
34
27
52
52
52
52
52
52
52
52
33
56
18
26
58
58
26
16
26
58
26
58