JX-200-Rev00 - 第3页
20. OCC COMPONENTS..................... .............. ........... ............ .............. ........... ........... .............. . .......... .............. .............. .... 39 ＯＣＣ 関係 21. PWB CONVEYOR COMPONENTS …
CONTENTS
目 次
MAIN UNIT
本体
1. BASE FRAME COMPONENTS ...........................................................................................................................................1
ベースフレーム関係
2. BASE FRAME ELECTRIC APPARATUS COMPONENTS (1) ............................................................................................3
ベースフレーム電装関係 （１）
3. BASE FRAME ELECTRIC APPARATUS COMPONENTS (2) ............................................................................................5
ベースフレーム電装関係 （２）
4. BASE FRAME ELECTRIC APPARATUS COMPONENTS (3) ............................................................................................7
ベースフレーム電装関係 （３）
5. CAL BLOCK COMPONENTS ..............................................................................................................................................9
ＣＡＬ ブロック関係
6. ATC COMPONENTS .........................................................................................................................................................11
ＡＴＣ 関係
7. VCS COMPONENTS.........................................................................................................................................................13
ＶＣＳ 関係
8. COVER COMPONENTS (1) ..............................................................................................................................................15
カバー関係（１）
9. COVER COMPONENTS (2) ..............................................................................................................................................17
カバー関係（２）
10. COVER COMPONENTS (3) ............................................................................................................................................19
カバー関係（３）
11. COVER COMPONENTS (4) ............................................................................................................................................21
カバー関係（４）
12. AIR COMPONENTS.........................................................................................................................................................23
エアー関係
13. X-Y COMPONENTS (1)...................................................................................................................................................25
Ｘ − Ｙ 関係（１）
14. X-Y COMPONENTS (2)...................................................................................................................................................27
Ｘ − Ｙ 関係（２）
15. FEEDER BANK COMPONENTS.....................................................................................................................................29
フィーダバンク関係
16. REAR FEEDER BANK COMPONENTS..........................................................................................................................31
リアフィーダバンク関係
17. HEAD COMPONENTS (1)...............................................................................................................................................33
ヘッド関係（１）
18. HEAD COMPONENTS (2)...............................................................................................................................................35
ヘッド関係（２）
19. HEAD RELATED COMPONENTS...................................................................................................................................37
ヘッド周り関係
20. OCC COMPONENTS.......................................................................................................................................................39
ＯＣＣ 関係
21. PWB CONVEYOR COMPONENTS (1) ...........................................................................................................................41
基板搬送関係（１）
22. PWB CONVEYOR COMPONENTS (2) ...........................................................................................................................43
基板搬送関係（２）
23. ACCESSORIES PART COMPONENTS..........................................................................................................................45
梱包添付品関係
OPTION
オプション
24. HMS, SIGNAL LIGHT & NOZZLE ASSEMBLY................................................................................................................47
ＨＭＳ・シグナルライト・ノズルアッセンブリ関係
25. CONVEYOR EXTENTION GUIDE & AUXILIARY MEMORY COMPONENTS................................................................49
搬送延長ガイド・補助記憶装置関係
26. VACCUM PUMP UNIT.....................................................................................................................................................51
真空ポンプユニット
27. MAIN LINE FILTER COMPONENTS...............................................................................................................................53
メインラインフィルタ関係
28. SYSTEM DIAGRAM (POWER UNIT/BASE)....................................................................................................................55
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＰＯＷＥＲ ＵＮＩＴ ／ ＢＡＳＥ）
29. SYSTEM DIAGRAM (FEEDER/CPU/SSCNET&XY MOTOR).........................................................................................57
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＦＥＥＤＥＲ ／ ＣＰＵ ／ ＳＳＣＮＥＴ ＆ ＸＹ ＭＯＴＯＲ）
30. SYSTEM DIAGRAM (ZT MOTOR/HEAD UNIT/LASER ALIGN)......................................................................................59
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＺＴ ＭＯＴＯＲ ／ ＨＥＡＤ ＵＮＩＴ ／ ＬＡＳＥＲ ＡＬＩＧＮ）
31. SYSTEM DIAGRAM (CARRY MOTOR/VCS)..................................................................................................................61
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＣＡＲＲＹ ＭＯＴＯＲ ／ ＶＣＳ）
32. SYSTEM DIAGRAM (POWER-UNIT ST 1/2)...................................................................................................................63
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＰＯＷＥＲ − ＵＮＩＴ ＳＴ １／２）
33. SYSTEM DIAGRAM (POWER-UNIT ST 2/2)...................................................................................................................65
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＰＯＷＥＲ − ＵＮＩＴ ＳＴ ２／２）
34. SYSTEM DIAGRAM (POWER-UNIT EN 1/2)..................................................................................................................67
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＰＯＷＥＲ − ＵＮＩＴ ＥＮ １／２）
35. SYSTEM DIAGRAM (POWER-UNIT EN 2/2)..................................................................................................................69
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＰＯＷＥＲ − ＵＮＩＴ ＥＮ ２／２）
36. SYSTEM DIAGRAM (SAFETY UNIT)..............................................................................................................................71
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＳＡＦＥＴＹ ＵＮＩＴ）
- 1 -
MAIN UNIT
本体
1. BASE FRAME COMPONENTS
ベースフレーム関係
8
6
4
5
51
3
7
17
2
9
8
1
50
23
30
31
32
32
39
38
42
44
43
45
46
47 48
49
54
35
36
37
36
37
39
35
37
37
36
37
39
35
37
19 20
55
53
26
29
29
29
28
28
28
10
13
14
18
18
15
16
12
11
18
22
21
24
25
25
25
25
34
27
34
27
21
34
27
41
40
52
52
52
52
52
52
52
52
33
34
27