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FX-3R Maintenance Guide i Rev. 1.00 [1] X-Y UNIT ................................................................................................. 1-1 1-1. Replacing the Magnescale .......................................…
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Important
FX-3R Maintenance Guide
i
Rev. 1.00
[1] X-Y UNIT.................................................................................................1-1
1-1. Replacing the Magnescale .....................................................................................1-1
1-1-1. X-Axis Magnescale Affixing Position.................................................................................... 1-2
1-1-2. Y-Axis Magnescale Affixing Position.................................................................................... 1-3
1-1-3. Clearance of the Magnescale .............................................................................................. 1-4
1-1-4. Re-obtaining the Parameters after Replacement of the Magnescale................................... 1-4
1-2. Replacing the Limit Sensor and Origin Near Sensor ..............................................1-5
1-2-1. Replacing the X+/− Limit Sensor and X-Near Sensor .......................................................... 1-5
1-2-2. Replacing the Y +Limit Sensor and YB-Near Sensor........................................................... 1-6
1-2-3. Replacing the X-axis Interference Sensor (Y-C Sensor)...................................................... 1-7
1-3. Replacing the Cable Bear.......................................................................................1-8
1-3-1. Replacing the X-Axis Cable Bear......................................................................................... 1-8
1-3-2. Replacing the Y-Axis Cable Bear......................................................................................... 1-9
1-4. Replacing the Roller Lubrication Part ...................................................................1-10
[2] HEAD UNIT.............................................................................................2-1
2-1. Replacing and Adjusting the Head .........................................................................2-1
2-2. Replacing the Motor ...............................................................................................2-7
2-2-1. Replacing the Z-Motor ......................................................................................................... 2-7
2-2-2. Replacing the θ-Motor.......................................................................................................... 2-9
2-3. Replacing the Laser Sensor (LNC60)...................................................................2-10
2-4. Replacing the Head Up Cylinder ..........................................................................2-11
2-5. Replacing the Belts...............................................................................................2-12
2-5-1. Replacing the Timing Belt Z............................................................................................... 2-12
2-5-2. Replacing the Timing Belt θ ............................................................................................... 2-12
2-6. Replacing the Z-Slide Shaft ..................................................................................2-13
2-7. Readjustment After Replacement of Head Unit ....................................................2-14
[3] PARTS AROUND THE HEAD.................................................................3-1
3-1. Replacing the Solenoid Valves ...............................................................................3-1
3-2. Replacing the Filter.................................................................................................3-3
3-3. Replacing the Bad Mark Sensor .............................................................................3-4
3-3-1. Sensor Assembly .................................................................................................................3-4
3-3-2. Adjusting the Sensor Height................................................................................................. 3-5
3-3-3. Amplifier............................................................................................................................... 3-5
3-3-4. Assembling the Fiber Unit to the Amplifier ........................................................................... 3-6
3-3-5. Amplifier Setting................................................................................................................... 3-7
3-3-6. Manual Setting Method for the F70R Fiber Sensor Amplifier............................................... 3-8
3-4. Replacing the HMS.................................................................................................3-9
FX-3R Maintenance Guide
ii
Rev. 1.00
3-4-1. Replacing the HMS Head .................................................................................................... 3-9
3-4-2. Replacing the Amplifier ........................................................................................................ 3-9
3-4-3. Sticking the Label............................................................................................................... 3-10
3-4-4. Adjusting the HMS Height.................................................................................................. 3-10
3-5. Replacing the Head Board ...................................................................................3-11
3-5-1. Replacing the Head Main Board ........................................................................................ 3-11
3-6. Replacing the ZT-Driver Board .............................................................................3-12
3-6-1. Replacing the ZT-Driver Board .......................................................................................... 3-12
[4] OCC ASSEMBLY ....................................................................................4-1
4-1. Replacing the OCC Assembly ................................................................................4-1
4-2. Replacing the CCD Camera and Lens ...................................................................4-2
4-3. Replacing the OCC Coaxial/Angle Light Board Assemblies ...................................4-3
4-4. Replacing the Lens Filter........................................................................................4-4
4-5. Adjusting the Focus ................................................................................................4-6
4-6. Adjusting the OCC Light Quantity...........................................................................4-7
4-7. Replacing the Solder Recognition Light Board .......................................................4-8
4-8. Readjustment After Replacement of OCC Unit.......................................................4-9
[5] BOARD TRANSPORT UNIT...................................................................5-1
5-1. Replacing the Transport Belt ..................................................................................5-1
5-2. Replacing the Transport Pulley...............................................................................5-2
5-2-1. Transport Pulley A Assembly: E21117150A0 ...................................................................... 5-2
5-2-2. Transport Pulley B Assembly: E20897210A0 ...................................................................... 5-2
5-3. Replacing the STATION, IN, OUT, and JOINT Motors...........................................5-3
5-4. Replacing the IN and OUT Sensors .......................................................................5-4
5-5. Replacing the WAIT, STOP, and C-OUT Sensors..................................................5-5
5-5-1. Replacing the Fiber.............................................................................................................. 5-5
5-5-2. Replacing the Amplifier Unit................................................................................................. 5-5
5-5-3. Adjusting the Sensitivity of the WAIT/STOP/C-OUT Sensor................................................ 5-7
5-6. Replacing the Stopper Cylinder ............................................................................5-10
5-7. Replacing the Support Table Home Position Sensor
(BU Home Position Sensor)..................................................................................5-11
5-8. Replacing the T-PIN Sensor (Optional) ................................................................5-11
5-9. Replacing the Pusher Y Cylinder (Outer Shape Reference).................................5-12
5-10. Replacing the Centering Pin (Optional) ................................................................5-13
5-11. Replacing the Support Table Motor (BU Motor)....................................................5-14
5-11-1. Adjusting the Gap between Torque Supporter and Support Motor ...................................... 5-15
5-11-2. Adjusting the Tension of the Support Table Driving Timing Belt ........................................ 5-15
5-11-3. Placing the Support Table Surface Horizontally................................................................. 5-15