DECAN_S1_Maintenance(Eng_Ver1.1)_Print.pdf - 第51页
W ee kly Inspe ction chapt er 4 Nex t Generation, Multi- Functi onal Placer DE CAN S1 M ain ten anc e Ha nd boo k 4-2 Cleaning Head Mirror W eekly Inspe ction T ool for M aintenanc e Air sprayer , alcohol, ultra-fine fib…
Weekly Inspection
chapter 4
Next Generation, Multi-Functional Placer
DECAN S1 Maintenance Handbook
4-1
Cleaning Head Fly Camera Lens
Tool for Maintenance
Air sprayer, alcohol, swab, wrench
Measures
Step 1.
Move the X Frame to front by referring to "Forward
movement of the X-frame" on page 1-3.
Step 2.
Press the 'STOP' and 'RESET' buttons in order after
pressing the 'EMG' button on the OP panel to stop
operation.
For more details, refer to "How to perform emergency stop" on page
1-2.
Step 3.
Unscrew the camera cover fixing screw using an M3
wrench and remove the camera cover from the head
assembly.
Step 4.
Remove any dust on the lens using an air spray. If
foreign materials are not removed completely, clean the
lens with a cotton swab slightly wetted with alcohol.
Caution
Cleaning the lens by exerting force may damage the surface of the
lens.
Step 5.
Release the emergency stop as described in "Releasing
'Emergency Stop' mode" on page 1-6 and perform the
operation again.
Cleaning Head Fly Camera Lens
chapter 4
Weekly Inspection
(Time required: 5min / No. W-1)
Weekly Inspection
chapter 4
Next Generation, Multi-Functional Placer
DECAN S1 Maintenance Handbook
4-2
Cleaning Head Mirror
Weekly Inspection
Tool for Maintenance
Air sprayer, alcohol, ultra-fine fiber cloth
Measures
Step 1.
Move the X Frame to front by referring to "Forward
movement of the X-frame" on page 1-3
Step 2.
Press the 'STOP' and 'RESET' buttons in order after
pressing the 'EMG' button on the OP panel to stop
operation.
For more details, refer to "How to perform emergency stop" on page
1-2.
Step 3.
Remove the dust from the mirror using an air sprayer.
Step 4.
If the foreign material is not removed completely, clean
the mirror using a ultra-fine fiber cloth smeared with
alcohol.
Caution
Cleaning the lens by exerting force may damage the surface of the
lens.
Step 5.
Release the emergency stop as described in "Releasing
'Emergency Stop' mode" on page 1-6 and perform the
operation again.
Cleaning Head Mirror
(Time required: 5min / No. W-2)
Weekly Inspection
chapter 4
Next Generation, Multi-Functional Placer
DECAN S1 Maintenance Handbook
4-3
Checking the Solenod Valve
Measures
Step 1.
Insert the CN040 nozzle into the ANC.
Step 2.
Operate the machine to install the CN040 nozzle of the
ANC on the head.
Step 3.
Select the 'Diagnosis' menu of the MMI and select the
'Vacuum' submenu.
2
1
Checking the Solenod Valve
(Time required: 20min / No. W-3)