Maintenance Manual - 第104页

AV131 MAINTENANCE MANUAL 5.1 I nserti on Head Un i t D79MEC- Y1-M00- A0 5.1- 1 5.1. Insertion H ead Uni t D79MEC -Y1- M00 -A0 5.1. 1 Inserti on Head Unit No. N610052012A A V Axis ov erlimi t pos i ti on - side -0.45 t o …

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AV131
MAINTENANCE MANUAL
5. SENSOR LAYOUT
D79MEC-Y0-000-A0
5-2
D79MEC-Y0-000-A0
5. SENSOR LAYOUT
This chapter describes sensor layout.
AV131
MAINTENANCE MANUAL
5.1 Insertion Head Unit
D79MEC-Y1-M00-A0
5.1-1
5.1. Insertion Head Unit
D79MEC-Y1-M00-A0
5.1.1 Insertion Head
Unit No. N610052012AA
V Axis overlimit position
- side -0.45 to -0.50mm
+ side 4.00 to 5.50mm
θH Axis overlimit position
- side -95.0° to 97.0°
Head
θH
+ side 185.0° to 187.0°
No. Name Type
1. Cylinder forward detection D-A73
2. Cylinder reverse detection D-A73
3. V axis origin detection P921SA1
4. V axis (+) safety limit P921SA1
5. V axis (-) safety limit P921SA1
6.
θH axis origin detection
EE-SX870A
7.
θH axis (+) safety limit
EE-SX870A
8.
θH axis (-) safety limit
EE-SX870A
1.
2.
3.
4.
5.
6.
7.
8.
θH axis origin
θ
H axis (-) safety limit
θ
H axis (+) safety limit
AV131
MAINTENANCE MANUAL
5.1 Insertion Head Unit
D79MEC-Y1-M00-A0
5.1-2
5.1.2 Insertion Unit Drive
Unit No. N610052015AA
No. Name Type
1. WH axis origin P914SA1
1.