Maintenance Manual - 第112页

AV131 MAINTENANCE MANUAL 5.5 Lower Posit i oning Unit D79MEC- Y4-000-A 0 5.5- 1 5.5. Lower Positioning Unit D79MEC -Y4- 00 0-A0 5.5. 1 X-Y Table Unit (X A xis Drive) Unit No. N610055746A A No. Name T y p e 1. X axi s (+)…

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AV131
MAINTENANCE MANUAL
5.4 PCB Positioning Unit
D79MEC-Y3-400-A0
5.4-2
AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-1
5.5. Lower Positioning Unit
D79MEC-Y4-000-A0
5.5.1 X-Y Table Unit (X Axis Drive)
Unit No. N610055746AA
No. Name Type
1. X axis (+) (-) safety limit detection LS-11S / RL
2. X axis (-) overlimit detection P921SA1
3. X axis origin detection P921S1
4. X axis (+) overlimit detection P921SA1
1.
3.
4.
2.
AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-2
5.5.2 X-Y Table Unit (Y Axis Drive)
Unit No. N610055746AA
No. Name Type
1. Y axis (+) (-) safety limit detection LS-11S / RL
2. Y axis (-) overlimit detection P921SA1
3. Y axis origin detection P921S1
4. Y axis (+) overlimit detection P921SA1
1.
3.
2.
4.