Maintenance Manual - 第113页

AV131 MAINTENANCE MANUAL 5.5 Lower Posit i oning Unit D79MEC- Y4-000-A 0 5.5- 2 5.5. 2 X-Y Table Unit (Y A xis Drive) Unit No. N610055746A A No. Name T y p e 1. Y axi s (+) (-) sa f et y limit det ection LS-11S / RL 2. Y…

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AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-1
5.5. Lower Positioning Unit
D79MEC-Y4-000-A0
5.5.1 X-Y Table Unit (X Axis Drive)
Unit No. N610055746AA
No. Name Type
1. X axis (+) (-) safety limit detection LS-11S / RL
2. X axis (-) overlimit detection P921SA1
3. X axis origin detection P921S1
4. X axis (+) overlimit detection P921SA1
1.
3.
4.
2.
AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-2
5.5.2 X-Y Table Unit (Y Axis Drive)
Unit No. N610055746AA
No. Name Type
1. Y axis (+) (-) safety limit detection LS-11S / RL
2. Y axis (-) overlimit detection P921SA1
3. Y axis origin detection P921S1
4. Y axis (+) overlimit detection P921SA1
1.
3.
2.
4.
AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-3
Schematic Diagram of Sensor Positions
Y axis (-)
Power OFF
Inversion
Inversion
Power OFF
X axis (+)
X axis (-)
Y axis (+)
Power OFF
Inversion
Inversion
Power OFF
328
±
0.1
8.7±0.1
9.7±0.1