Maintenance Manual - 第114页

AV131 MAINTENANCE MANUAL 5.5 Lower Posit i oning Unit D79MEC- Y4-000-A 0 5.5- 3  Sche matic Diagra m of Senso r Position s Y a x is (-) Pow er OFF In v ers ion Inv ersi on Po we r OFF X ax is (+ ) X a x is (-) Y a x is …

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AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-2
5.5.2 X-Y Table Unit (Y Axis Drive)
Unit No. N610055746AA
No. Name Type
1. Y axis (+) (-) safety limit detection LS-11S / RL
2. Y axis (-) overlimit detection P921SA1
3. Y axis origin detection P921S1
4. Y axis (+) overlimit detection P921SA1
1.
3.
2.
4.
AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-3
Schematic Diagram of Sensor Positions
Y axis (-)
Power OFF
Inversion
Inversion
Power OFF
X axis (+)
X axis (-)
Y axis (+)
Power OFF
Inversion
Inversion
Power OFF
328
±
0.1
8.7±0.1
9.7±0.1
AV131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
D79MEC-Y4-000-A0
5.5-4