RV-1-Rev01.pdf - 第70页
A 17 基板バックアップ ユニット Backup unit 3 18 27 5 27 5 27 5 5 5 5 5 5 5 5 9 9 9 30 25 25 19 7 22 1 1 22 23 35 25 36 37 30 28 36 35 33 34 20 10 6 14 24 22 31 29 35 12 22 19 37 23 22 1 1 22 19 35 25 26 8 9 9 9 27 27 27 27 37 36 9 2…
A17
基板バックアップユニット
Backup unit
3
18
27
5
27
5
27
5
5
5
5
5
5
5
5
9
9
9
30
25
25
19
7
22
11
22
23
35
25
36
37
30
28
36
35
33
34
20
10
6
14
24
22
31
29
35
12
22
19
37
23
22
11
22
19
35
25
26
8
9
9
9
27
27
27
27
37
36
9
28
27
27
9
27
37
36
32
32
21
15
1
13
2
4
4
16
17
A-55
A17
基板バックアップユニット
Backup unit
ｲﾗｽﾄ番号
Ref.No.
部品コード
Parts Code
部品名
Parts Name
Serial
No.
個数
Q'ty
備考
Remarks
同期
Repl.
EZA-1914-334-A
ﾊﾞﾂｸ
ｱﾂﾌﾟ
ﾕﾆﾂﾄ
UP UNIT, BACK
1 EZ1-492-439-11
ｾﾝｻ
-
ASSY (
ﾊﾞﾂｸｱﾂﾌﾟ
ｼﾞﾖｳｼﾖｳ
)
ASSY, SENSOR
1
2 EZ1-492-439-21
ｾﾝｻ-
ASSY (
ﾊﾞﾂｸｱﾂﾌﾟ
ｶｺｳ
)
ASSY, SENSOR
1
3 EZ2-675-994-01
ﾊﾞﾂｸｱﾂﾌﾟ
ｽﾎﾟﾝｼﾞ
(
ｱｵ
)
SPONGE (BLUE), BACK UP
1
4 EZ3-703-360-51
ﾍｲｺｳﾋﾟﾝ
(
ﾌｱｲ
3X8)
PIN, PARALLEL (DIA. 3X8)
2
5 EZ3-971-050-01
E
ﾘﾝｸﾞ
RING, E
10
6 EZ4-193-192-01
ﾗﾊﾞ- ﾏｸﾞﾈﾂﾄ
MAGNET, RUBBER
1
7 EZ4-447-110-01
ｴﾙﾎﾞ
ﾕﾆｵﾝ
(KQ2L04-M5N)
UNION (KQ2L04-M5N), ELBOW
2
8 EZ4-456-649-02
ｽﾗｲﾄﾞ
ｼﾔﾌﾄ
SHAFT, SLIDE
1
9 EZ4-456-650-03
ﾘﾝｸ ﾌﾟﾚ-ﾄ
PLATE, LINK
8
10 EZ4-456-651-01
ﾍﾞ-ｽ
BASE
1
11 EZ4-456-652-01
ﾍﾞｱﾘﾝｸﾞ
ﾎﾙﾀﾞ
HOLDER, BEARING
2
12 EZ4-456-653-01
ﾁﾖｳｾｲ
ﾈｼﾞ
ﾎﾙﾀﾞ
HOLDER, ADJUSTMENT SCREW
1
13 EZ4-456-654-01
ｼﾞﾖｲﾝﾄ
JOINT
1
14 EZ4-456-655-02
ｽﾗｲﾄﾞ
ﾌﾞﾛﾂｸ
BLOCK, SLIDE
1
15 EZ4-456-656-01
ｼﾘﾝﾀﾞ
ﾄﾘﾂｹ
ﾌﾞﾗｹﾂﾄ
BRACKET, CYLINDER FITTING
1
16 EZ4-456-657-01
ｽﾗｲﾄﾞ
ｶﾞｲﾄﾞ
(1)
GUIDE, SLIDE (1)
1
17 EZ4-456-657-11
ｽﾗｲﾄﾞ
ｶﾞｲﾄﾞ
(2)
GUIDE, SLIDE (2)
1
18 EZ4-456-659-01
ﾄﾂﾌﾟ ﾌﾟﾚ-ﾄ
PLATE, TOP
1
19 EZ4-456-660-01
ﾍﾞｱﾘﾝｸﾞ ｽﾍﾟ-ｻ
SPACER, BEARING
3
20 EZ4-456-661-01
LM
ｶﾞｲﾄﾞ
(SRS9MUU+75LM)
LM GUIDE (SRS9MUU+75LM)
1
21 EZ4-456-662-01
ｼﾘﾝﾀﾞ
(CDJP2B16-25D)
CYLINDER (CDJP2B16-25D)
1
22 EZ4-456-663-01
ﾍﾞｱﾘﾝｸﾞ
(MR85ZZ)
BEARING (MR85ZZ)
6
23 EZ4-456-664-01
ﾍﾞｱﾘﾝｸﾞｵｻｴﾋﾟﾝ
(BGPML5-8-L16-F6)
PIN (BGPML5-8-L16-F6), RETAINER
2
24 EZ4-456-666-01
ﾍﾞｱﾘﾝｸﾞﾖｳ ｽﾍﾟ-ｻ
(CLBPM5-8-8)
SPACER (CLBPM5-8-8), BEARING
1
25 EZ4-456-667-01
ｼﾞｸ
(SSFRZ8-34-F8-B3-P5-T8-S3*)
SHAFT (SSFRZ8-34-F8-B3-P5-T8-*)
4
26 EZ4-456-667-11
ｼﾞｸ
(SSFRZ8-39-F8-B3-P5-T8-S3*)
SHAFT (SSFRZ8-39-F8-B3-P5-T8-*)
1
27 EZ4-456-668-11
ｼﾑ
ﾘﾝｸﾞ
(CIMRS5-10-1.0)
RING (CIMRS5-10-1.0), SHIM
10
28 EZ4-456-669-02
ﾍﾞｱﾘﾝｸﾞ
(NTSBG8-8)
BEARING (NTSBG8-8)
2
29 EZ4-456-670-01
ﾁﾖｳｾｲ
ﾈｼﾞ
ｾﾂﾄ
(ANBN3-30)
SCREW SET (ANBN3-30)
1
A-56